{"id":652,"date":"2024-08-28T09:15:21","date_gmt":"2024-08-28T00:15:21","guid":{"rendered":"https:\/\/rtlearner.com\/?p=652"},"modified":"2024-09-28T16:05:46","modified_gmt":"2024-09-28T07:05:46","slug":"semiconductor-process-deposition","status":"publish","type":"post","link":"https:\/\/rtlearner.com\/en\/semiconductor-process-deposition\/","title":{"rendered":"[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc99d\ucc29 \uacf5\uc815 (Deposition)"},"content":{"rendered":"\n<p>\ubc15\ub9c9 \uacf5\uc815\uc774\ub77c\uace0\ub3c4 \ud558\ub294 \uc99d\ucc29 \uacf5\uc815(Deposition)\uc740 \uc6e8\uc774\ud37c \uc704\uc5d0 \uc587\uace0 \uade0\uc77c\ud55c \ubc15\ub9c9(1\u339b \uc774\ud558 \ub450\uaed8\uc758 \ub9c9)\uc744 \uc99d\ucc29\ud558\ub294 \uacfc\uc815\uc73c\ub85c, \ud06c\uac8c \ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29\uc778 PVD(Phisical Vapor Deposition)\uc640 \ud654\ud559\uae30\uc0c1\uc99d\ucc29\uc778 CVD(Chemical Vapor Deposition)\ub85c \ub098\ub269\ub2c8\ub2e4.<\/p>\n\n\n\n<p>PVD\ub294 \uace0\uc9c4\uacf5 \uc0c1\ud0dc\uc5d0\uc11c \uc99d\ucc29\ud558\ub824\ub294 \ubb3c\uc9c8 \uc18c\uc2a4\uc5d0 \uc5d0\ub108\uc9c0\ub97c \uac00\ud574 \uae30\ud654\uc2dc\ucf1c \uae30\ud310\uc5d0 \uc99d\ucc29\uc2dc\ud0a4\ub294 Evaporation \ubc29\ubc95\uacfc \uc18c\uc2a4 \ud0c0\uac9f\uc5d0 \ud50c\ub77c\uc988\ub9c8 \uc774\uc628\uc744 \uac15\ud558\uac8c \ucda9\ub3cc\uc2dc\ucf1c \uc18c\uc2a4 \uc6d0\uc790\uac00 \ud280\uc5b4\ub098\uc640 \uae30\ud310\uc5d0 \uc99d\ucc29\uc2dc\ud0a4\ub294 Sputtering \ubc29\ubc95\uc744 \uc8fc\ub85c \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p>CVD\ub294 \uae30\uccb4 \uc0c1\ud0dc\uc758 \uc18c\uc2a4 \ubb3c\uc9c8\uc744 \uae30\ud310\uc73c\ub85c \uc774\ub3d9\uc2dc\ucf1c \ubc15\ub9c9\uc5d0 \uc99d\ucc29\ud558\ub294 \ubc29\ubc95\uc785\ub2c8\ub2e4. \uc8fc\ub85c \uc5f4\uacfc \ud50c\ub77c\uc988\ub9c8 \ub4f1\uc758 \uc5d0\ub108\uc9c0\ub97c \uac00\ud574 \ud654\ud559\ubc18\uc751\uc744 \uc77c\uc73c\ud0b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image652_7084fb-82.kb-image-is-ratio-size, .kb-image652_7084fb-82 .kb-image-is-ratio-size{max-width:650px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_7084fb-82.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_7084fb-82 .kb-image-is-ratio-size{align-self:unset;}.kb-image652_7084fb-82 figure{max-width:650px;}.kb-image652_7084fb-82 .image-is-svg, .kb-image652_7084fb-82 .image-is-svg img{width:100%;}.kb-image652_7084fb-82 .kb-image-has-overlay:after{opacity:0.3;}.kb-image652_7084fb-82 img.kb-img, .kb-image652_7084fb-82 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image652_7084fb-82.kb-image-is-ratio-size, .kb-image652_7084fb-82 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image652_7084fb-82 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image652_7084fb-82\"><figure class=\"aligncenter size-large\"><img data-dominant-color=\"c4d6dd\" data-has-transparency=\"false\" style=\"--dominant-color: #c4d6dd;\" loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"397\" src=\"https:\/\/rtlearner.com\/wp-content\/uploads\/2024\/08\/\uadf8\ub9bc4-1024x397.jpg\" alt=\"\ubc15\ub9c9 \uacf5\uc815 \ubd84\ub958\" class=\"kb-img wp-image-653 not-transparent\" srcset=\"https:\/\/rtlearner.com\/wp-content\/uploads\/2024\/08\/\uadf8\ub9bc4-1024x397.jpg 1024w, https:\/\/rtlearner.com\/wp-content\/uploads\/2024\/08\/\uadf8\ub9bc4-300x116.jpg 300w, https:\/\/rtlearner.com\/wp-content\/uploads\/2024\/08\/\uadf8\ub9bc4-768x298.jpg 768w, https:\/\/rtlearner.com\/wp-content\/uploads\/2024\/08\/\uadf8\ub9bc4.jpg 1200w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><figcaption>\ubc15\ub9c9 \uacf5\uc815 \ubd84\ub958<\/figcaption><\/figure><\/div>\n\n\n\n<figure class=\"wp-block-table is-style-stripes has-small-font-size\"><table><thead><tr><th class=\"has-text-align-center\" data-align=\"center\"><\/th><th>PVD<\/th><th>CVD<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">\uc7a5\uc810<\/td><td>&#8211; \uc800\uc628, \uc548\uc804\ud55c \uacf5\uc815<br>&#8211; \uace0\uc9c4\uacf5 \ud658\uacbd (\uc624\uc5fc\ub3c4 \ub0ae\uc74c)<br>&#8211; \uace0\ud488\uc9c8 \ubc15\ub9c9 \uc99d\ucc29 \uac00\ub2a5<br>&#8211; \uac04\ub2e8\ud55c \uc7a5\ube44\uad6c\uc870<\/td><td>&#8211; \uc99d\ucc29 \uc18d\ub3c4 \ube60\ub984<br>&#8211; \uc88b\uc740 step coverage<br>&#8211; \ub2e4\uc591\ud55c \uc18c\uc2a4 gas \uc0ac\uc6a9\uac00\ub2a5<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\">\ub2e8\uc810<\/td><td>&#8211; \uc99d\ucc29 \uc18d\ub3c4 \ub290\ub9bc<br>&#8211; Adhesion issue<\/td><td>&#8211; \ubcc0\uc218 \ud1b5\uc81c \ud798\ub4e6<br>&#8211; \uac00\uc2a4 \uc0ac\uc6a9\uc2dc \uc704\ud5d8<br>&#8211; \uc7a5\ube44 \ubcf5\uc7a1<br>&#8211; \uace0\uc628 \ud658\uacbd<br>&#8211; \uc99d\ucc29 \uac00\ub2a5 \ubb3c\uc9c8 \uc81c\ud55c<\/td><\/tr><\/tbody><\/table><figcaption class=\"wp-element-caption\">PVD VS CVD \ube44\uad50<\/figcaption><\/figure>\n\n\n<style>.kb-table-of-content-nav.kb-table-of-content-id652_e53465-b6 .kb-table-of-content-wrap{padding-top:var(--global-kb-spacing-sm, 1.5rem);padding-right:var(--global-kb-spacing-sm, 1.5rem);padding-bottom:var(--global-kb-spacing-sm, 1.5rem);padding-left:var(--global-kb-spacing-sm, 1.5rem);box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kb-table-of-content-nav.kb-table-of-content-id652_e53465-b6 .kb-table-of-contents-title-wrap{padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.kb-table-of-content-nav.kb-table-of-content-id652_e53465-b6 .kb-table-of-contents-title{font-weight:regular;font-style:normal;}.kb-table-of-content-nav.kb-table-of-content-id652_e53465-b6 .kb-table-of-content-wrap .kb-table-of-content-list{font-weight:regular;font-style:normal;margin-top:var(--global-kb-spacing-sm, 1.5rem);margin-right:0px;margin-bottom:0px;margin-left:0px;}@media all and (max-width: 767px){.kb-table-of-content-nav.kb-table-of-content-id652_e53465-b6 .kb-table-of-contents-title{font-size:var(--global-kb-font-size-md, 1.25rem);}.kb-table-of-content-nav.kb-table-of-content-id652_e53465-b6 .kb-table-of-content-wrap .kb-table-of-content-list{font-size:var(--global-kb-font-size-sm, 0.9rem);}}<\/style>\n\n<style>.kadence-column652_bacfec-3b > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column652_bacfec-3b > .kt-inside-inner-col,.kadence-column652_bacfec-3b > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column652_bacfec-3b > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column652_bacfec-3b > .kt-inside-inner-col{flex-direction:column;}.kadence-column652_bacfec-3b > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column652_bacfec-3b > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column652_bacfec-3b{position:relative;}@media all and (max-width: 1024px){.kadence-column652_bacfec-3b > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column652_bacfec-3b > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column652_bacfec-3b\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-oxidation\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc0b0\ud654 \uacf5\uc815 (Oxidation)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-photolithography\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-etching\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc2dd\uac01 \uacf5\uc815 (Etching)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-doping\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ub3c4\ud551 \uacf5\uc815 (Doping)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-cleaning\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc138\uc815 \uacf5\uc815 (Cleaning)<\/a><\/p>\n<\/div><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Deposition \uc885\ub958<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">PVD, Physical Vapor Deposition<\/h3>\n\n\n\n<p>PVD\uc5d0\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uace0\uc9c4\uacf5 \uc0c1\ud0dc\uc5d0\uc11c \ud654\ud559\ubc18\uc751 \uc5c6\uc774 \uc99d\ucc29\ud558\uae30 \ub54c\ubb38\uc5d0 \ub2e4\uc591\ud55c \ubb3c\uc9c8\uc744 \uc18c\uc2a4\ub85c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc74c<\/li>\n\n\n\n<li>\uae30\ud310 \uc628\ub3c4\ub97c \uc790\uc720\ub86d\uac8c \uc870\uc808\ud560 \uc218 \uc788\uc74c. \uc774\uc678\uc5d0\ub3c4 \uc9c4\uacf5\ub3c4\ub098 \uc804\uc555 \ub4f1\uc758 \uc870\uc808\ud560 \uc218 \uc788\ub294 \ubcc0\uc218\uac00 \ub9ce\uc74c<\/li>\n\n\n\n<li>\uace0\uc9c4\uacf5 \ud658\uacbd\uc5d0\uc11c \uc99d\ucc29\ud558\uae30 \ub54c\ubb38\uc5d0 particle \uac19\uc740 \uc624\uc5fc\uc774 \uc801\uc74c<\/li>\n<\/ul>\n\n\n\n<p>\ub2e4\ub9cc CVD \ub300\ube44 step coverage\ub098 \ubc15\ub9c9 \uade0\uc77c\ub3c4\uac00 \uc88b\uc9c0 \ubabb\ud558\ub2e4\ub294 \ub2e8\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">Evaporation<\/h4>\n\n\n\n<p>Evaporation\uc5d0\ub294 \ud06c\uac8c \uc5f4\uc744 \uc774\uc6a9\ud558\ub294 Thermal evapoator\uc640 \uc804\uc790\ube54\uc744 \uc0ac\uc6a9\ud558\ub294 e-beam evaporator\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image652_5d1018-db.kb-image-is-ratio-size, .kb-image652_5d1018-db .kb-image-is-ratio-size{max-width:600px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_5d1018-db.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_5d1018-db .kb-image-is-ratio-size{align-self:unset;}.kb-image652_5d1018-db figure{max-width:600px;}.kb-image652_5d1018-db .image-is-svg, .kb-image652_5d1018-db .image-is-svg img{width:100%;}.kb-image652_5d1018-db .kb-image-has-overlay:after{opacity:0.3;}.kb-image652_5d1018-db img.kb-img, .kb-image652_5d1018-db .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image652_5d1018-db.kb-image-is-ratio-size, .kb-image652_5d1018-db .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image652_5d1018-db figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image652_5d1018-db\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/bOEM2X\/btsqtaQMMPM\/zoZRTguOZnFP7i24iKKNk1\/img.png\" alt=\"Evaporator \uc885\ub958\" class=\"kb-img\"\/><figcaption>Evaporator \uc885\ub958<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uace0\uc9c4\uacf5(~10<sup>-6<\/sup>&nbsp;torr)\ubd84\uc704\uae30\uc5d0\uc11c \uc9c4\ud589\ub418\ub294 thermal evaporation \uc99d\ucc29\uc740 \uc18c\uc2a4 \ubb3c\uc9c8\uc774 \uc5f4\uc5d0 \uc758\ud574 \uae30\ud654\ub418\uace0 \ud655\uc0b0\ud558\uc5ec \uae30\ud310\uc5d0 \ud761\ucc29\ub418\uba74 \uc751\ucd95\ub418\ub294 \uac04\ub2e8\ud55c \uc808\ucc28\ub85c \uc9c4\ud589\ub418\uae30 \ub54c\ubb38\uc5d0 \uc7a5\ube44\uac00 \ub2e8\uc21c\ud558\ub2e4\ub294 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ub2e4\ub9cc \ub450\uaebc\uc6b4 \ub9c9\uc744 \uc99d\ucc29\ud558\uae30 \uc5b4\ub835\uace0 \ub179\ub294\uc810\uc774 \ub192\uc740 \ubb3c\uc9c8\uc740 \uc99d\ucc29\ud558\uae30 \uc5b4\ub824\uc6b0\uba70, \uae30\ud310\uacfc \uc811\ucc29\ub825\uc774 \ub0ae\ub2e4\ub294 \ub2e8\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc774\uc640 \uac19\uc740 \ubb38\uc81c\ub97c \ud574\uacb0\ud558\uae30 \uc704\ud574 \uc18c\uc2a4\uc5d0 \uc804\uc790\ube54\uc744 \uac00\ud574 \uc99d\ubc1c\uc2dc\ud0a4\ub294 E-beam evaporator\ub97c \uc0ac\uc6a9\ud558\uae30\ub3c4 \ud569\ub2c8\ub2e4. Thermal evaporator \ub300\ube44 \uc99d\ucc29 \uc18d\ub3c4\ub3c4 \ube60\ub974\uace0, \ub179\ub294\uc810\uc774 \ub192\uc740 \ubb3c\uc9c8\ub3c4 \uc99d\ucc29\uc774 \uac00\ub2a5\ud558\uba70, \uc811\ucc29 \ubb38\uc81c\ub3c4 \uac1c\uc120\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub2e4\ub9cc, \uc811\ucc29 \ubb38\uc81c\ub294 \uc644\uc804\ud788 \ud574\uacb0\ud558\uae30 \ud798\ub4e0\ub370\uc694, \uc800\ub294 E-beam evaporator\ub85c Pt\ub97c \uc99d\ucc29\ud588\ub294\ub370 bare wafer \uc704\uc5d0 Pt\ub97c \uc99d\ucc29\ud558\uba74 adhesion issue\uac00 \uc788\uc5b4\uc11c Ti\ub97c adhesion layer\ub85c 5nm \uc815\ub3c4 \uc99d\ucc29\ud558\uace0 Pt\ub97c \uc99d\ucc29\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uadf8\ub9ac\uace0 E-beam evaporator\uc758 \uacbd\uc6b0&nbsp;<strong>X-ray<\/strong>\uac00 \ubc1c\uc0dd\ud560 \uc218 \uc788\ub2e4\ub294 \ubb38\uc81c\uac00 \uc788\uc2b5\ub2c8\ub2e4. SiO<sub>2<\/sub>\ub3c4 E-beam evaporator\ub85c \uc99d\ucc29\ud560 \uc218 \uc788\uc5b4\uc11c \uc5f0\uad6c\uc5d0 \ud65c\uc6a9\ud588\ub294\ub370, \ud0dc\uc591\uc804\uc9c0 \uc5f0\uad6c\ud300\uc740 X-ray\uac00 \uc18c\uc790\uc5d0\uac8c \uc601\ud5a5\uc744 \uc918\uc11c E-beam evaporator\uac00 \uc544\ub2c8\ub77c PECVD\ub85c SiO<sub>2<\/sub>\ub97c \uc99d\ucc29\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>Evaporation\uc740 \uc5b4\ub5a4 \uc18c\uc2a4\ub97c \uc99d\ucc29\ud558\ub290\ub0d0\uc5d0 \ub530\ub77c \uc5b4\ub5a4 boat(\uc18c\uc2a4\ub97c \ub2f4\ub294 \uc6a9\uae30)\ub97c \uc0ac\uc6a9\ud558\ub294\uc9c0 \uc815\ud574\uc57c \ud558\ub294\ub370, \uc8fc\ub85c W(\ud145\uc2a4\ud150)\uc774\ub098 Mo(\ubab0\ub9ac\ube0c\ub374)\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">Sputter<\/h4>\n\n\n\n<p>Sputter\ub294 \ud0c0\uac9f\uc5d0 \uace0\uc5d0\ub108\uc9c0 \uc785\uc790(\ud50c\ub77c\uc988\ub9c8)\ub97c \ucda9\ub3cc\uc2dc\ucf1c \ub098\uc628 \uc18c\uc2a4 \ubb3c\uc9c8\ub4e4\uc774 \uae30\ud310 \ud45c\uba74\uc5d0 \ud761\ucc29\ub418\uc5b4 \uc99d\ucc29\ub418\ub294 \ubc29\uc2dd\uc785\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image652_fbc0d7-d8.kb-image-is-ratio-size, .kb-image652_fbc0d7-d8 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_fbc0d7-d8.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_fbc0d7-d8 .kb-image-is-ratio-size{align-self:unset;}.kb-image652_fbc0d7-d8 figure{max-width:500px;}.kb-image652_fbc0d7-d8 .image-is-svg, .kb-image652_fbc0d7-d8 .image-is-svg img{width:100%;}.kb-image652_fbc0d7-d8 .kb-image-has-overlay:after{opacity:0.3;}.kb-image652_fbc0d7-d8 img.kb-img, .kb-image652_fbc0d7-d8 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image652_fbc0d7-d8.kb-image-is-ratio-size, .kb-image652_fbc0d7-d8 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image652_fbc0d7-d8 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image652_fbc0d7-d8\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/dLb7Do\/btsqtuIwCIm\/E5h0ibRs5k4duqEhKftJg0\/img.png\" alt=\"Sputter \uc774\ud574\" class=\"kb-img\"\/><figcaption>Sputter \uc774\ud574<\/figcaption><\/figure><\/div>\n\n\n\n<p>\ud50c\ub77c\uc988\ub9c8\ub294 \uc548\uc815\ud55c \ubd88\ud65c\uc131 \uc6d0\uc18c\uc778 Ar\uc744 \uc8fc\ub85c \uc0ac\uc6a9\ud558\ub294\ub370 \ud50c\ub77c\uc988\ub9c8\ub85c \ub9cc\ub4e4\uace0 \uac00\uc18d\ud574 10eV \uc774\uc0c1\uc758 \uc5d0\ub108\uc9c0\ub97c \uac00\uc9c0\uace0 \ud0c0\uac9f\uc5d0 \ucda9\ub3cc\ud558\uba74 \ud0c0\uac9f \uc6d0\uc790\uac00 \ud280\uc5b4\ub098\uc624\uac8c \ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc99d\ucc29\uc774 \uc9c4\ud589\ub418\ub294 \ucc54\ubc84(Chamber)\ub294 \uae30\ubcf8\uc801\uc73c\ub85c \uace0\uc9c4\uacf5 \uc0c1\ud0dc\uc774\uc9c0\ub9cc \ud50c\ub77c\uc988\ub9c8\ub97c \uc0dd\uc131\uc2dc\ud0a4\uae30 \uc704\ud574 Ar \uac00\uc2a4\ub97c \uc8fc\uc785\ud558\uace0 \uc2e4\uc81c \uc99d\ucc29\uc774 \uc9c4\ud589\ub420 \ub54c\ub294 1~100mtorr\uc758 \uc555\ub825\uc744 \uc720\uc9c0\ud558\uac8c \ub429\ub2c8\ub2e4. Evaporator \ub300\ube44 \ub9cc \ubc30 \uc815\ub3c4 \uc555\ub825\uc774 \ub192\uae30 \ub54c\ubb38\uc5d0 step coverage\ub97c \uac1c\uc120\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">CVD, Chemical Vapor Deposition<\/h3>\n\n\n\n<p>CVD\ub294 \uace0\uc9c4\uacf5\uc5d0\uc11c \uc99d\ucc29\uc744 \uc9c4\ud589\ud558\ub294 PVD\uc640 \ub2ec\ub9ac \ub300\uae30\uc555\uc774\ub098 \uc911\uc9c4\uacf5(100~10<sup>-1<\/sup>Pa)\uc5d0\uc11c \uc99d\ucc29\uc744 \uc9c4\ud589\ud569\ub2c8\ub2e4. \ucc54\ubc84\uc5d0 \ubc18\uc751\uc131 \uac00\uc2a4\ub97c \uc8fc\uc785\ud558\uba74 \uae30\ud310\uc5d0 \ubd99\uace0, \uc5f4\uacfc \ud50c\ub77c\uc988\ub9c8 \ub4f1\uc744 \ud1b5\ud574 \uc5d0\ub108\uc9c0\ub97c \ud1b5\ud574 \ud654\ud559\ubc18\uc751\uc744 \uc77c\uc73c\ucf1c \ubc15\ub9c9\uc744 \ud615\uc131\ud569\ub2c8\ub2e4.&nbsp;<\/p>\n\n\n<style>.kb-image652_c0ca16-b8.kb-image-is-ratio-size, .kb-image652_c0ca16-b8 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_c0ca16-b8.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_c0ca16-b8 .kb-image-is-ratio-size{align-self:unset;}.kb-image652_c0ca16-b8 figure{max-width:500px;}.kb-image652_c0ca16-b8 .image-is-svg, .kb-image652_c0ca16-b8 .image-is-svg img{width:100%;}.kb-image652_c0ca16-b8 .kb-image-has-overlay:after{opacity:0.3;}.kb-image652_c0ca16-b8 img.kb-img, .kb-image652_c0ca16-b8 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image652_c0ca16-b8.kb-image-is-ratio-size, .kb-image652_c0ca16-b8 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image652_c0ca16-b8 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image652_c0ca16-b8\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/cnFjHI\/btsqERvRDoC\/6Zodsfk8gHStkErg4ErKhK\/img.png\" alt=\"CVD \uc99d\ucc29 \uacfc\uc815\" class=\"kb-img\"\/><figcaption>CVD \uc99d\ucc29 \uacfc\uc815<\/figcaption><\/figure><\/div>\n\n\n\n<ol class=\"wp-block-list\">\n<li>\ubc18\uc751\uc131 \uac00\uc2a4\uac00 \ucc54\ubc84 \ub0b4\uc5d0\uc11c \uae30\ud310 \ud45c\uba74 \uc704\uc5d0 \uc77c\uc815\ud55c \uc18d\ub3c4\ub85c \ud750\ub978\ub2e4.<\/li>\n\n\n\n<li>\uae30\ud310 \ud45c\uba74\uc5d0\uc11c \ub9c8\ucc30\ub85c \uc778\ud574 \uac00\uc2a4\uac00 \ud750\ub974\ub294 \uc18d\ub3c4\uac00 0\uc73c\ub85c \uc904\uc5b4\ub4dc\ub294\ub370 \uc774\ub97c \uc815\uccb4\uce35(boundary layer)\uc774\ub77c\uace0 \ud55c\ub2e4.<\/li>\n\n\n\n<li>\uc815\uccb4\uce35\uc758 \uac00\uc2a4\ub294 \uc6e8\uc774\ud37c\uc5d0 \ud761\ucc29\ub418\uc5b4 \uac00\uc2a4 \ub18d\ub3c4\uac00 \ub0ae\uc544\uc9c0\uace0 \ub18d\ub3c4\uac00 \ub192\uc740 \uc8fc\ubcc0\uc5d0\uc11c \uac00\uc2a4\uac00 \uacc4\uc18d \uc815\uccb4\uce35\uc73c\ub85c \uc720\uc785\ub418\uc5b4 \uae30\ud310 \ud45c\uba74\uc5d0 \uacf5\uae09\ub41c\ub2e4.<\/li>\n\n\n\n<li>\uae30\ud310 \ud45c\uba74\uc758 \ud654\ud559\ubc18\uc751\uc73c\ub85c \uc778\ud574 \ubc15\ub9c9\uc774 \uc99d\ucc29\ub418\uace0 \uc0dd\uc131\ubb3c\uc740 \ucc54\ubc84 \ubc16\uc73c\ub85c \ubc30\ucd9c\ub41c\ub2e4.<\/li>\n<\/ol>\n\n\n\n<h4 class=\"wp-block-heading\">CVD \uacf5\uc815\uc758 \uc7a5\ub2e8\uc810<\/h4>\n\n\n\n<figure class=\"wp-block-table is-style-stripes\"><table class=\"has-fixed-layout\"><thead><tr><th class=\"has-text-align-center\" data-align=\"center\">\uc7a5\uc810<\/th><th class=\"has-text-align-center\" data-align=\"center\">\ub2e8\uc810<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">\uc5f4 \uc0b0\ud654\ub9c9 \ub300\ube44 \uc800\uc628\uc5d0\uc11c \uc99d\ucc29<br>\uc88b\uc740 step coverage<br>\ubc15\ub9c9 \ub450\uaed8 \uc870\uc808 \uc26c\uc6c0<br>\ub2e4\uc591\ud55c gas \uc18c\uc2a4 \uc0ac\uc6a9 \uac00\ub2a5<\/td><td class=\"has-text-align-center\" data-align=\"center\">\ubc18\uc751 \ubcc0\uc218\uac00 \ub9ce\uc544 \uc815\ud655\ud55c \ub808\uc2dc\ud53c \uc124\uc815 \ud544\uc694<br>\uac00\uc2a4 \uc704\ud5d8\uc131<br>\ubcf5\uc7a1\ud55c \uc7a5\ube44<br>\uc99d\ucc29 \uac00\ub2a5 \ubb3c\uc9c8\uc774 \ub9ce\uc9c0 \uc54a\uc74c<\/td><\/tr><\/tbody><\/table><figcaption class=\"wp-element-caption\">CVD \uc7a5\uc810\uacfc \ub2e8\uc810<\/figcaption><\/figure>\n\n\n\n<h4 class=\"wp-block-heading\">APCVD, Atmospheric Pressure Chemical&nbsp;Vapor&nbsp;Deposition<\/h4>\n\n\n<style>.kb-image652_8059d9-d7.kb-image-is-ratio-size, .kb-image652_8059d9-d7 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_8059d9-d7.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_8059d9-d7 .kb-image-is-ratio-size{align-self:unset;}.kb-image652_8059d9-d7 figure{max-width:500px;}.kb-image652_8059d9-d7 .image-is-svg, .kb-image652_8059d9-d7 .image-is-svg img{width:100%;}.kb-image652_8059d9-d7 .kb-image-has-overlay:after{opacity:0.3;}.kb-image652_8059d9-d7 img.kb-img, .kb-image652_8059d9-d7 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image652_8059d9-d7.kb-image-is-ratio-size, .kb-image652_8059d9-d7 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image652_8059d9-d7 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image652_8059d9-d7\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/YzFy1\/btsqwXxXp5f\/mGFerjoEGJDpuoc6cOLz10\/img.png\" alt=\"APCVD \uc99d\ucc29 \uc7a5\ube44\" class=\"kb-img\"\/><figcaption>APCVD \uc99d\ucc29 \uc7a5\ube44<\/figcaption><\/figure><\/div>\n\n\n\n<p>\ub300\uae30\uc555\uc5d0\uc11c \uacf5\uc815\uc774 \uc9c4\ud589\ub418\ub294 APCVD\uc758 \uacbd\uc6b0 \uc555\ub825\uc774 \ub192\uc544 \ud654\ud559\ubc18\uc751\uc744 \ud558\ub294 \uc785\uc790\uac00 \ub9ce\uae30 \ub54c\ubb38\uc5d0 \ubc18\uc751\uc774 \uc27d\uac8c \uc77c\uc5b4\ub098 \ub0ae\uc740 \uc628\ub3c4\uc5d0\uc11c \uacf5\uc815\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4. \ub610\ud55c \uc785\uc790\ub4e4\ub07c\ub9ac \ucda9\ub3cc\uc774 \ub9ce\uc544 MFP(Mean Free Path)\uac00 \uc9e7\uae30 \ub54c\ubb38\uc5d0 \ubaa8\ub4e0 \ubc29\ud5a5\uc73c\ub85c \uc99d\ucc29\uc774 \uc77c\uc5b4\ub098\uac8c \ub429\ub2c8\ub2e4. \uc774 \uacbd\uc6b0, arrival angle\uc774 \ud070 \ucf54\ub108\uc5d0\ub9cc \uc99d\ucc29\uc774 \ube68\ub9ac \ub418\uc5b4 step coverage\uac00 \ub098\ube60\uc9c8 \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4. \ub610\ud55c \ud654\ud559\ubc18\uc751\uc774 \ub9ce\uc774 \uc77c\uc5b4\ub098\uae30 \ub54c\ubb38\uc5d0 \uae30\ud310 \ud45c\uba74\ubfd0\ub9cc \uc544\ub2c8\ub77c \ucc54\ubc84 \ub0b4\ubd80\uc5d0\uc11c \ud654\ud559\ubc18\uc751\uc774 \uc77c\uc5b4\ub098\uace0, \uc774\uc5d0 \ub530\ub77c \uc0dd\uc131\ub41c \ubb3c\uc9c8\uc774 \ud30c\ud2f0\ud074 \ud615\ud0dc\ub85c \uc624\uc5fc\uc758 \uc6d0\uc778\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\ud558\uc9c0\ub9cc \uc9c4\uacf5 \uc7a5\ube44\uac00 \ud544\uc694\ud558\uc9c0 \uc54a\uc544 \uc7a5\ube44\uac00 \ub2e8\uc21c\ud558\uace0 \uc800\ub834\ud558\ub2e4\ub294 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">LPCVD, Low Pressure Chemical&nbsp;Vapor&nbsp;Deposition<\/h4>\n\n\n<style>.kb-image652_bdf9cc-fe.kb-image-is-ratio-size, .kb-image652_bdf9cc-fe .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_bdf9cc-fe.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_bdf9cc-fe .kb-image-is-ratio-size{align-self:unset;}.kb-image652_bdf9cc-fe figure{max-width:500px;}.kb-image652_bdf9cc-fe .image-is-svg, .kb-image652_bdf9cc-fe .image-is-svg img{width:100%;}.kb-image652_bdf9cc-fe .kb-image-has-overlay:after{opacity:0.3;}.kb-image652_bdf9cc-fe img.kb-img, .kb-image652_bdf9cc-fe .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image652_bdf9cc-fe.kb-image-is-ratio-size, .kb-image652_bdf9cc-fe .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image652_bdf9cc-fe figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image652_bdf9cc-fe\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/DhK7a\/btsqC8ETAYU\/UMbuJkmJOyo6aOmhgiMkx0\/img.png\" alt=\"LPCVD \uc99d\ucc29 \uc7a5\ube44\" class=\"kb-img\"\/><figcaption>LPCVD \uc99d\ucc29 \uc7a5\ube44<\/figcaption><\/figure><\/div>\n\n\n\n<p>\ub0ae\uc740 \uc555\ub825\uc5d0\uc11c \uc99d\ucc29\uc744 \uc9c4\ud589\ud558\ub294 LPCVD\uc758 \uacbd\uc6b0\ubcf4\ub2e4 \ud488\uc9c8\uc774 \uc88b\uc740 \ubc15\ub9c9\uc744 \ud615\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub2e4\ub9cc \uc555\ub825\uc774 \ub0ae\uc544 \uc99d\ucc29 \uc18d\ub3c4\uac00 \ub290\ub9ac\uae30 \ub54c\ubb38\uc5d0 \uc5f4\uc744 \uac00\ud574 \ub192\uc740 \uc628\ub3c4\uc5d0\uc11c \uacf5\uc815\uc744 \uc9c4\ud589\ud558\uace0 100~200\uc7a5\uc758 \uc6e8\uc774\ud37c\ub97c \ubc30\uce58(batch) \ubc29\uc2dd\uc73c\ub85c \ud55c \ubc88\uc5d0 \uc99d\ucc29\ud558\uc5ec \uc0dd\uc0b0\uc131\uc744 \ub192\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p>APCVD \ub300\ube44 \ub0ae\uc740 \uc555\ub825\uacfc \ub192\uc740 \uc628\ub3c4\uc5d0\uc11c \uc99d\ucc29\ud558\uae30 \ub54c\ubb38\uc5d0 \ubc15\ub9c9\uc758 \ud488\uc9c8\uc774\ub098 \uade0\uc77c\ub3c4, step coverage \ub4f1\uc774 \uac1c\uc120\ub429\ub2c8\ub2e4. \ub2e4\ub9cc \uc9c4\uacf5 \uc7a5\ube44\uc640 Hot wall\uc774 \ucd94\uac00\ub418\uc5b4 \uc7a5\ube44 \uad6c\uc870\uac00 \ubcf5\uc7a1\ud558\uace0 \ub354 \ube44\uc309\ub2c8\ub2e4.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">PECVD, Plasma Enhanced Chemical Vapor Deposition<\/h4>\n\n\n\n<p>LPCVD\uc758 \uacbd\uc6b0 \uace0\uc628\uc5d0\uc11c \uacf5\uc815\uc774 \uc9c4\ud589\ub418\uae30 \ub54c\ubb38\uc5d0, \uc6e8\uc774\ud37c\uc5d0 Al \uac19\uc740 \ub179\ub294\uc810\uc774 \ub0ae\uc740 \uae08\uc18d\uc774 \uc99d\ucc29\ub418\uc5b4 \uc788\ub294 \uacbd\uc6b0 CVD\ub97c \uc9c4\ud589\ud560 \uc218 \uc5c6\ub2e4\ub294 \ub2e8\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7f4 \uacbd\uc6b0 APCVD\uac00 \uc0ac\uc6a9\ub418\uc5c8\ub294\ub370\uc694, \uc55e\uc5d0\uc11c \ub9d0\uc500\ub4dc\ub9b0 \ubb38\uc81c\uc810\ub4e4\uc744 \ud574\uacb0\ud558\uae30 \uc704\ud574 PECVD \ubc29\uc2dd\uc744 \ub3c4\uc785\ud558\uc600\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image652_5895b4-d3.kb-image-is-ratio-size, .kb-image652_5895b4-d3 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_5895b4-d3.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image652_5895b4-d3 .kb-image-is-ratio-size{align-self:unset;}.kb-image652_5895b4-d3 figure{max-width:500px;}.kb-image652_5895b4-d3 .image-is-svg, .kb-image652_5895b4-d3 .image-is-svg img{width:100%;}.kb-image652_5895b4-d3 .kb-image-has-overlay:after{opacity:0.3;}.kb-image652_5895b4-d3 img.kb-img, .kb-image652_5895b4-d3 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image652_5895b4-d3.kb-image-is-ratio-size, .kb-image652_5895b4-d3 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image652_5895b4-d3 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image652_5895b4-d3\"><figure class=\"aligncenter\"><a href=\"https:\/\/lnf-wiki.eecs.umich.edu\/wiki\/Plasma_enhanced_chemical_vapor_deposition\" class=\"kb-advanced-image-link\" target=\"_blank\" rel=\"noopener noreferrer\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/nKtf9\/btsqC9DN9f5\/S314eCXtN35nKvvC7C3cK1\/img.jpg\" alt=\"PECVD \uc7a5\ube44\" class=\"kb-img\"\/><\/a><figcaption>PECVD \uc7a5\ube44<\/figcaption><\/figure><\/div>\n\n\n\n<p>PECVD\ub294 \ubc18\uc751\uc5d0\ub108\uc9c0\ub85c \uc5f4\uc5d0\ub108\uc9c0\uc640 \ud50c\ub77c\uc988\ub9c8\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uadf8\ub807\uae30 \ub54c\ubb38\uc5d0 LPCVD \ub300\ube44 \ub0ae\uc740 \uc628\ub3c4\uc5d0\uc11c \ube60\ub978 \uc99d\ucc29\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4. \ub2e4\ub9cc, plasma damage\uac00 \ubc1c\uc0dd\ud558\uc5ec \uc6e8\uc774\ud37c\uc5d0 \uc601\ud5a5\uc744 \uc904 \uc218 \uc788\uace0 \ubc15\ub9c9\uc5d0 \ubd88\uc21c\ubb3c\uc774 \ud3ec\ud568\ub418\uc5b4 LPCVD \ub300\ube44 \ubc15\ub9c9 \ud488\uc9c8\uc774 \ub5a8\uc5b4\uc9c4\ub2e4\ub294 \ub2e8\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uadf8\ub807\uc9c0\ub9cc APCVD \ub300\ube44 \ubc15\ub9c9\uc758 \ud488\uc9c8\uc744 \uac1c\uc120\ud560 \uc218 \uc788\uc5b4\uc11c \uc800\ud76c \uc5f0\uad6c\uc2e4\ub3c4 APCVD \uc7a5\ube44\ub97c PECVD \uc7a5\ube44\ub85c \uac1c\uc870\ud558\uc5ec \uc0ac\uc6a9\ud588\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<figure class=\"wp-block-table is-style-stripes\"><table><thead><tr><th class=\"has-text-align-center\" data-align=\"center\">\uad6c\ubd84<\/th><th>APCVD<\/th><th>LPCVD<\/th><th>PECVD<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">\ud2b9\uc9d5<\/td><td>\uc0c1\uc555 \uacf5\uc815<\/td><td>\uc800\uc555 \/ \uace0\uc628 \uacf5\uc815<\/td><td>\ud50c\ub77c\uc988\ub9c8 \ud65c\uc6a9<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\">\uc7a5\uc810<\/td><td>\uac04\ub2e8\ud55c \uc7a5\ube44<br>\ub9e4\uc6b0 \ube60\ub978 \uc99d\ucc29 \uc18d\ub3c4<br>\uc800\uc628 \uacf5\uc815<\/td><td>\uace0\uc21c\ub3c4 \ubc15\ub9c9 \ud615\uc131<br>\ubc15\ub9c9 \uade0\uc77c\ub3c4 \uc88b\uc74c<br>Step coverage \uc88b\uc74c<\/td><td>\uc800\uc628 \uacf5\uc815<br>\ube60\ub978 \uc99d\ucc29 \uc18d\ub3c4<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\">\ub2e8\uc810<\/td><td>\ub098\uc05c step coverage<br>\ubd88\uc21c\ubb3c, \ud30c\ud2f0\ud074 \uc624\uc5fc<\/td><td>\uace0\uc628 \uacf5\uc815<br>\ub290\ub9b0 \uc99d\ucc29 \uc18d\ub3c4<\/td><td>\ubd88\uc21c\ubb3c, \ud30c\ud2f0\ud074 \uc624\uc5fc<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\">\uc801\uc6a9<br>\uacf5\uc815<\/td><td>PSG Passivation<br>-&gt; PECVD\ub85c \ub300\uccb4<\/td><td>Pre-metal Dielectric<br>Oxide, Nitride, W<\/td><td>Intermetal dielectric<br>Passivation<\/td><\/tr><\/tbody><\/table><figcaption class=\"wp-element-caption\">CVD \uc7a5\ube44 \ud2b9\uc131 \ube44\uad50<\/figcaption><\/figure>\n\n\n<style>.kadence-column652_a7923e-71 > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column652_a7923e-71 > .kt-inside-inner-col,.kadence-column652_a7923e-71 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column652_a7923e-71 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column652_a7923e-71 > .kt-inside-inner-col{flex-direction:column;}.kadence-column652_a7923e-71 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column652_a7923e-71 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column652_a7923e-71{position:relative;}@media all and (max-width: 1024px){.kadence-column652_a7923e-71 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column652_a7923e-71 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column652_a7923e-71\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-oxidation\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc0b0\ud654 \uacf5\uc815 (Oxidation)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-photolithography\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-etching\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc2dd\uac01 \uacf5\uc815 (Etching)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-doping\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ub3c4\ud551 \uacf5\uc815 (Doping)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-cleaning\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc138\uc815 \uacf5\uc815 (Cleaning)<\/a><\/p>\n<\/div><\/div>\n\n\n\n<p>\ucc38\uace0: <a href=\"https:\/\/semiconductor.samsung.com\/kr\/support\/tools-resources\/fabrication-process\/eight-essential-semiconductor-fabrication-processes-part-6-deposition-and-ion-implantation-for-the-electrical-properties\/\" target=\"_blank\" rel=\"noopener\">\uc0bc\uc131\uc804\uc790 [\ubc18\ub3c4\uccb4 \ubc31\uacfc\uc0ac\uc804]<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Deposition process, also known as thin film process, is a process of depositing a thin, uniform film (1\u339b) on a wafer.<\/p>","protected":false},"author":1,"featured_media":653,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[3],"tags":[28,42],"class_list":["post-652","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-semiconductor-process-and-device","tag-semiconductor","tag-42"],"_links":{"self":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/652","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/comments?post=652"}],"version-history":[{"count":6,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/652\/revisions"}],"predecessor-version":[{"id":875,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/652\/revisions\/875"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media\/653"}],"wp:attachment":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media?parent=652"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/categories?post=652"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/tags?post=652"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}<!-- 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