{"id":649,"date":"2024-09-13T08:51:41","date_gmt":"2024-09-12T23:51:41","guid":{"rendered":"https:\/\/rtlearner.com\/?p=649"},"modified":"2025-11-13T15:18:30","modified_gmt":"2025-11-13T06:18:30","slug":"semiconductor-process-cleaning","status":"publish","type":"post","link":"https:\/\/rtlearner.com\/en\/semiconductor-process-cleaning\/","title":{"rendered":"[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc138\uc815 \uacf5\uc815 (Cleaning)"},"content":{"rendered":"\n<p>\uc6d0\ub798\ub294 \uc99d\ucc29(Deposition)\uc5d0 \ub300\ud574 \uc4f0\ub824\uace0 \ud588\ub294\ub370 \uc138\uc815\uacf5\uc815\uc5d0 \ub300\ud55c \uae00\uc744 \uba3c\uc800 \uc4f0\uae30\ub85c \ud588\uc2b5\ub2c8\ub2e4. \ud3ec\ud1a0 \uacf5\uc815(Photolithography) &#8211; \uc2dd\uac01 \uacf5\uc815(Etching) &#8211; \uc138\uc815 \uacf5\uc815(Cleaning)\uc740 &#8216;\ud3ec\uc5d0\ud074&#8217;\uc774\ub77c\uace0 \ubb36\uc5b4\uc11c \ubd80\ub974\ub294\ub370\uc694, \uad00\ub828 \ubd80\uc11c\ub294 \uc9c4\uc9dc \ube61\uc138\ub2e4\uace0 \ud569\ub2c8\ub2e4. \uc81c\uac00 \uc5f0\uad6c\uc2e4\uc5d0\uc11c \ud3ec\ud1a0 \uc7a5\ube44\uc778 \uc5bc\ub77c\uc774\ub108 \ub2f4\ub2f9\uc790 \uc5ed\ud560\uc744 \ud588\uc5c8\ub294\ub370\uc694, \uc27d\uc9c0 \uc54a\uae34 \ud588\uc2b5\ub2c8\ub2e4 \u3160\u3160<\/p>\n\n\n\n<p>\uc138\uc815\uc740 \uc6e8\uc774\ud37c \ud45c\uba74\uc758 \ud30c\ud2f0\ud074\uc774\ub098 \uc720\uae30 \uc624\uc5fc\ubb3c, \ub610\ub294 \uae08\uc18d \ubd88\uc21c\ubb3c\uc744 \uc81c\uac70\ud558\ub294 \uacfc\uc815\uc785\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \uce69 \ubd88\ub7c9\uc744 \uc904\uc774\uae30 \ub54c\ubb38\uc5d0 \uad49\uc7a5\ud788 \uc911\uc694\ud55c \uacf5\uc815\uc774\ub77c\uace0 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image649_1fd019-0b.kb-image-is-ratio-size, .kb-image649_1fd019-0b .kb-image-is-ratio-size{max-width:600px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image649_1fd019-0b.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image649_1fd019-0b .kb-image-is-ratio-size{align-self:unset;}.kb-image649_1fd019-0b figure{max-width:600px;}.kb-image649_1fd019-0b .image-is-svg, .kb-image649_1fd019-0b .image-is-svg img{width:100%;}.kb-image649_1fd019-0b .kb-image-has-overlay:after{opacity:0.3;}.kb-image649_1fd019-0b img.kb-img, .kb-image649_1fd019-0b .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image649_1fd019-0b.kb-image-is-ratio-size, .kb-image649_1fd019-0b .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image649_1fd019-0b figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image649_1fd019-0b\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/biM9ev\/btspsU9kW0P\/qMSF93p6sXmCT0raPutH6K\/img.png\" alt=\"\ubc18\ub3c4\uccb4 \uc624\uc5fc \uc885\ub958\" class=\"kb-img\"\/><figcaption>\ubc18\ub3c4\uccb4 \uc624\uc5fc \uc885\ub958<\/figcaption><\/figure><\/div>\n\n\n<style>.kb-table-of-content-nav.kb-table-of-content-id649_5a32c8-df .kb-table-of-content-wrap{padding-top:var(--global-kb-spacing-sm, 1.5rem);padding-right:var(--global-kb-spacing-sm, 1.5rem);padding-bottom:var(--global-kb-spacing-sm, 1.5rem);padding-left:var(--global-kb-spacing-sm, 1.5rem);box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kb-table-of-content-nav.kb-table-of-content-id649_5a32c8-df .kb-table-of-contents-title-wrap{padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.kb-table-of-content-nav.kb-table-of-content-id649_5a32c8-df .kb-table-of-contents-title{font-weight:regular;font-style:normal;}.kb-table-of-content-nav.kb-table-of-content-id649_5a32c8-df .kb-table-of-content-wrap .kb-table-of-content-list{font-weight:regular;font-style:normal;margin-top:var(--global-kb-spacing-sm, 1.5rem);margin-right:0px;margin-bottom:0px;margin-left:0px;}@media all and (max-width: 767px){.kb-table-of-content-nav.kb-table-of-content-id649_5a32c8-df .kb-table-of-contents-title{font-size:var(--global-kb-font-size-md, 1.25rem);}.kb-table-of-content-nav.kb-table-of-content-id649_5a32c8-df .kb-table-of-content-wrap .kb-table-of-content-list{font-size:var(--global-kb-font-size-sm, 0.9rem);}}<\/style>\n\n<style>.kadence-column649_507efd-1f > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column649_507efd-1f > .kt-inside-inner-col,.kadence-column649_507efd-1f > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column649_507efd-1f > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column649_507efd-1f > .kt-inside-inner-col{flex-direction:column;}.kadence-column649_507efd-1f > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column649_507efd-1f > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column649_507efd-1f{position:relative;}@media all and (max-width: 1024px){.kadence-column649_507efd-1f > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column649_507efd-1f > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column649_507efd-1f\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-oxidation\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc0b0\ud654 \uacf5\uc815 (Oxidation)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-photolithography\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-etching\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc2dd\uac01 \uacf5\uc815 (Etching)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-deposition\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc99d\ucc29 \uacf5\uc815 (Deposition)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-doping\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ub3c4\ud551 \uacf5\uc815 (Doping)<\/a><\/p>\n<\/div><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Cleaning \uc885\ub958<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc2b5\uc2dd \uc138\uc815 (wet cleaning)<\/h3>\n\n\n\n<p>\ub300\ubd80\ubd84\uc758 \uc2b5\uc2dd \uc138\uc815\uc740 1970\ub144\ub300\uc5d0 \uc18c\uac1c\ub41c RCA \uc138\uc815\uc744 \uae30\ubcf8\uc73c\ub85c \ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \uacfc\uc0b0\ud654\uc218\uc18c \uc6a9\uc561\uc744 \uae30\ubcf8\uc73c\ub85c \ud558\uace0 \uc788\ub294\ub370\uc694, SC-1 \ubc29\ubc95\uacfc SC-2 \ubc29\ubc95\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image649_b5ea30-10.kb-image-is-ratio-size, .kb-image649_b5ea30-10 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image649_b5ea30-10.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image649_b5ea30-10 .kb-image-is-ratio-size{align-self:unset;}.kb-image649_b5ea30-10 figure{max-width:500px;}.kb-image649_b5ea30-10 .image-is-svg, .kb-image649_b5ea30-10 .image-is-svg img{width:100%;}.kb-image649_b5ea30-10 .kb-image-has-overlay:after{opacity:0.3;}.kb-image649_b5ea30-10 img.kb-img, .kb-image649_b5ea30-10 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image649_b5ea30-10.kb-image-is-ratio-size, .kb-image649_b5ea30-10 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image649_b5ea30-10 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image649_b5ea30-10\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/pS4d6\/btspE3YFxYK\/FJkr6qcjixbi4ao2IJnk41\/img.png\" alt=\"\uc124\uba85 \ud654\ud559\uc2dd\" class=\"kb-img\"\/><figcaption>\uc124\uba85 \ud654\ud559\uc2dd<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc5fc\uae30\uc131 \uc6a9\uc561\uc744 \uc0ac\uc6a9\ud558\ub294 SC-1 \uc138\uc815\uc740 APM(Ammonia Peroxide Mixture)\ub77c\uace0\ub3c4 \ud558\uace0 \uc0b0\ud654\uc640 \uc2dd\uac01 \ubc18\uc751\uc73c\ub85c \uc138\uc815\uc744 \ud558\uae30 \ub54c\ubb38\uc5d0 \uc720\uae30\ubb3c\uc774\ub098 \ud30c\ud2f0\ud074\uc744 \uc81c\uac70\ud558\ub294\ub370 \uc6a9\uc774\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc0b0\uc131 \uc6a9\uc561\uc744 \uc0ac\uc6a9\ud558\ub294 SC-2 \uc138\uc815\uc740 HPM(Hydrochloric Acid and Peroxide Mixture)\ub77c\uace0\ub3c4 \ud558\uace0 \uae08\uc18d \ubd88\uc21c\ubb3c\uc744 \uc81c\uac70\ud558\ub294\ub370 \uc6a9\uc774\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc774\uc678\uc5d0\ub3c4 \ud669\uc0b0\uc744 \uc0ac\uc6a9\ud558\ub294 Piranha \uc138\uc815, HF\ub97c \uc0ac\uc6a9\ud558\ub294 DHF \uc138\uc815, \uc624\uc874 \uc138\uc815 \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\uac74\uc2dd \uc138\uc815 (dry cleaning)<\/h3>\n\n\n\n<p>\uac74\uc2dd \uc138\uc815\uc740 \uc6a9\uc561\uc744 \uc0ac\uc6a9\ud558\uc9c0 \uc54a\uc544 \ud3d0\uae30\ubb3c \ubc30\ucd9c\uc774 \uc801\uace0, \ud45c\uba74\uc7a5\ub825\uc73c\ub85c \uc778\ud574 \ubbf8\uc138\ud328\ud134\uc5d0\uc11c \ud560 \uc218 \uc5c6\ub294 \uc2b5\uc2dd \uc138\uc815\uc758 \ub2e8\uc810\uc744 \ubcf4\uc644\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub9ac\uace0 \uc9c4\uacf5 \ubd84\uc704\uae30\uc5d0\uc11c \uc9c4\ud589\ub418\uae30 \ub54c\ubb38\uc5d0 \ub9c8\ucc2c\uac00\uc9c0\ub85c \uc9c4\uacf5 \ubd84\uc704\uae30\uc5d0\uc11c \uc9c4\ud589\ub418\ub294 \uc99d\ucc29\uc774\ub098 \uc2dd\uac01 \uc7a5\ube44\uc5d0 \uc5f0\uacb0\ud558\uc5ec \uc138\uc815\uacf5\uc815\uc744 \uc9c4\ud589\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7f4 \uacbd\uc6b0, \uc6e8\uc774\ud37c \uc624\uc5fc\uc744 \ubc29\uc9c0\ud560 \uc218 \uc788\ub2e4\ub294 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\ub2e4\ub9cc \uc911\uae08\uc18d\uc740 \uac00\uc2a4\uc640\uc758 \ud654\ud559\ubc18\uc751\uc73c\ub85c \uc81c\uac70\ud558\uae30 \uc5b4\ub835\uace0, \uacf5\uc815 \uc7ac\ud604\uc131\uc774 \ub0ae\uc73c\uba70 \uacf5\uc815 \uc18d\ub3c4\uac00 \ub290\ub9ac\ub2e4\ub294 \ub2e8\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\ud604\uc7ac \uac1c\ubc1c\ub418\uace0 \uc788\ub294 \uac74\uc2dd \uc138\uc815 \ubc29\ubc95\uc740 HF vapor \uc138\uc815(\uc0b0\ud654\ub9c9 \uc81c\uac70), UV\/O<sub>3<\/sub>&nbsp;\uc138\uc815(\uc720\uae30\ub9c9 \uc81c\uac70), UV\/Cl<sub>2<\/sub>&nbsp;\uc138\uc815(\uae08\uc18d \ubd88\uc21c\ubb3c \uc81c\uac70), H<sub>2<\/sub>\/O<sub>2<\/sub>&nbsp;\ud50c\ub77c\uc988\ub9c8 \uc138\uc815(\ubbf8\uc138 \uc720\uae30\ubb3c \uc81c\uac70) \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<figure class=\"wp-block-table is-style-stripes has-small-font-size\"><table><thead><tr><th class=\"has-text-align-center\" data-align=\"center\"><\/th><th>\uc2b5\uc2dd \uc138\uc815 (wet cleaning)<\/th><th>\uac74\uc2dd \uc138\uc815 (dry cleaning)<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">\uc7a5\uc810<\/td><td>&#8211; \uacf5\uc815 \ud6c4 \ubb3c\uc5d0 \uc758\ud55c \uc138\ucc99 \uc6a9\uc774<br>&#8211; \uc0ac\uc6a9 \uc561\uccb4\uc5d0 \uac00\uc5f0\uc131\uc774 \uc5c6\uc74c<br>&#8211; \ub2e4\uc591\ud55c \ud654\ud559 \uc6a9\uc561 \uc0ac\uc6a9 \uac00\ub2a5<br>&#8211; \uc720\uae30\ubb3c \/ \ube44\uc720\uae30\ubb3c \uc81c\uac70\uc5d0 \ubaa8\ub450 \uc88b\uc74c<br>&#8211; \uc120\ud0dd\uc801 \uc81c\uac70 \ub2a5\ub825\uc774 \ube44\uad50\uc801 \uc6b0\uc218<br>&#8211; Low cost<\/td><td>&#8211; \uc801\uc740 \ud654\ud559 \uc6a9\uc561 \ubc0f DI water \uc0ac\uc6a9\ub7c9<br>&#8211; \uc801\uc740 \ud3d0\uc561 \ubc30\ucd9c, \uc6a9\uc774\ud55c \ud3d0\uc561 \ucc98\ub9ac<br>&#8211; Full scale cluster tool process \uac00\ub2a5<br>&#8211; High aspect ratio \uad6c\uc870\uc5d0 \uc720\ub9ac<br>&#8211; Particle \uc81c\uc5b4 \uc6a9\uc774<br>&#8211; Wet clean \uacf5\uc815\ubcf4\ub2e4 \uc548\uc804\ud55c Process<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\">\ub2e8\uc810<\/td><td>&#8211; \uc720\uae30\ud654\ud569\ubb3c\ubcf4\ub2e4 \uac74\uc870\uac00 \ub290\ub824 \uc794\ub958\ubb3c \ub0a8\uc74c<br>&#8211; \uc77c\ubd80 \uc720\uae30\ubb3c \uc81c\uac70 \ud6a8\uacfc\uac00 \uc720\uae30 Solvent \ubcf4\ub2e4 \ub0ae\uc74c<br>&#8211; \ub300\ubd80\ubd84\uc758 \ud654\ud559 \uc6a9\uc561\uc774 \uc720\ub3c5 \ubb3c\uc9c8<br>&#8211; \ub192\uc740 \ud3d0\uae30 \ube44\uc6a9<br>&#8211; \uc9c4\uacf5 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc0ac\uc6a9\ud558\uae30 \uc5b4\ub824\uc6c0<\/td><td>&#8211; \uace0\uac00\uc758 \uc7a5\ube44 \uc0ac\uc6a9<br>&#8211; \uc911\uae08\uc18d\uc774\ub098 \uc804\uc774\uae08\uc18d\uc758 \uc81c\uc5b4\uac00 \ud798\ub4e6<br>&#8211; \uc77c\ubc18\uc801\uc73c\ub85c Single-wafer process<br>&#8211; \uace0\uc628 \uacf5\uc815 \uc0ac\uc6a9 \uc2dc, \uae08\uc18d \ubd88\uc21c\ubb3c\uc758 \ud655\uc0b0 \uac00\ub2a5\uc131 \uc788\uc74c<\/td><\/tr><\/tbody><\/table><figcaption class=\"wp-element-caption\">\uc2b5\uc2dd\uc138\uc815, \uac74\uc2dd\uc138\uc815 \ube44\uad50<\/figcaption><\/figure>\n\n\n<style>.kadence-column649_a2ce2e-7b > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column649_a2ce2e-7b > .kt-inside-inner-col,.kadence-column649_a2ce2e-7b > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column649_a2ce2e-7b > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column649_a2ce2e-7b > .kt-inside-inner-col{flex-direction:column;}.kadence-column649_a2ce2e-7b > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column649_a2ce2e-7b > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column649_a2ce2e-7b{position:relative;}@media all and (max-width: 1024px){.kadence-column649_a2ce2e-7b > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column649_a2ce2e-7b > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column649_a2ce2e-7b\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-oxidation\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc0b0\ud654 \uacf5\uc815 (Oxidation)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-photolithography\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-etching\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc2dd\uac01 \uacf5\uc815 (Etching)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-deposition\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc99d\ucc29 \uacf5\uc815 (Deposition)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-doping\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ub3c4\ud551 \uacf5\uc815 (Doping)<\/a><\/p>\n<\/div><\/div>\n\n\n\n<p>\ucc38\uace0: <a href=\"https:\/\/news.skhynix.co.kr\/post\/quiz_wash_semiconductors\" target=\"_blank\" rel=\"noopener\">SK hynix \ub274\uc2a4\ub8f8<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>I was originally going to write about deposition, but decided to write about the cleaning process first\u2026<\/p>","protected":false},"author":1,"featured_media":650,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[3],"tags":[28,42],"class_list":["post-649","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-semiconductor-process-and-device","tag-semiconductor","tag-42"],"_links":{"self":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/649","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/comments?post=649"}],"version-history":[{"count":5,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/649\/revisions"}],"predecessor-version":[{"id":873,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/649\/revisions\/873"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media\/650"}],"wp:attachment":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media?parent=649"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/categories?post=649"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/tags?post=649"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}<!-- 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