{"id":636,"date":"2024-08-15T01:37:55","date_gmt":"2024-08-14T16:37:55","guid":{"rendered":"https:\/\/rtlearner.com\/?p=636"},"modified":"2024-08-15T01:37:58","modified_gmt":"2024-08-14T16:37:58","slug":"photolithography-issue-post-expose-baking-lift-off","status":"publish","type":"post","link":"https:\/\/rtlearner.com\/en\/photolithography-issue-post-expose-baking-lift-off\/","title":{"rendered":"[Photolithography] \ud3ec\ud1a0 \uacf5\uc815 \uc774\uc288 &#8211; PEB(Post-expose baking), Lift-off"},"content":{"rendered":"\n<p>\uc774\ubc88 \uae00\uc5d0\uc11c\ub294 \uc81c\uac00 \uc11d\uc0ac \uacfc\uc815 \uc911\uc5d0 \ud3ec\ud1a0 \uacf5\uc815\uc744 \ud558\uba74\uc11c \uc788\uc5c8\ub358 \uc774\uc288\ub4e4\uc5d0 \ub300\ud574 \uc124\uba85\ud558\ub3c4\ub85d \ud558\uaca0\uc2b5\ub2c8\ub2e4, \ud06c\uac8c PEB(Post-expose baking)\uc640 Lift off \uad00\ub828 \uc774\uc288\uc785\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-table-of-content-nav.kb-table-of-content-id636_00853d-ab .kb-table-of-content-wrap{padding-top:var(--global-kb-spacing-sm, 1.5rem);padding-right:var(--global-kb-spacing-sm, 1.5rem);padding-bottom:var(--global-kb-spacing-sm, 1.5rem);padding-left:var(--global-kb-spacing-sm, 1.5rem);box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kb-table-of-content-nav.kb-table-of-content-id636_00853d-ab .kb-table-of-contents-title-wrap{padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.kb-table-of-content-nav.kb-table-of-content-id636_00853d-ab .kb-table-of-contents-title{font-weight:regular;font-style:normal;}.kb-table-of-content-nav.kb-table-of-content-id636_00853d-ab .kb-table-of-content-wrap .kb-table-of-content-list{font-weight:regular;font-style:normal;margin-top:var(--global-kb-spacing-sm, 1.5rem);margin-right:0px;margin-bottom:0px;margin-left:0px;}@media all and (max-width: 767px){.kb-table-of-content-nav.kb-table-of-content-id636_00853d-ab .kb-table-of-contents-title{font-size:var(--global-kb-font-size-md, 1.25rem);}.kb-table-of-content-nav.kb-table-of-content-id636_00853d-ab .kb-table-of-content-wrap .kb-table-of-content-list{font-size:var(--global-kb-font-size-sm, 0.9rem);}}<\/style>\n\n<style>.kadence-column636_f778c6-56 > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column636_f778c6-56 > .kt-inside-inner-col,.kadence-column636_f778c6-56 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column636_f778c6-56 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column636_f778c6-56 > .kt-inside-inner-col{flex-direction:column;}.kadence-column636_f778c6-56 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column636_f778c6-56 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column636_f778c6-56{position:relative;}@media all and (max-width: 1024px){.kadence-column636_f778c6-56 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column636_f778c6-56 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column636_f778c6-56\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-photolithography\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/aligner-overview\/\">Aligner \uc774\ud574 \u2013 \uad6c\uc870\uc640 \uc791\ub3d9 \ubc29\uc2dd, \uc774\uc288<\/a><\/p>\n<\/div><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">PEB(Post-expose baking)<\/h2>\n\n\n\n<p>Expose \ud6c4 Develop \uc804\uc5d0 baking \ucc98\ub9ac\ub97c \ud558\ub294\ub370 \uc774\ub97c PEB\uc774\ub77c\uace0 \ud569\ub2c8\ub2e4. \ud3ec\ud1a0 \uacf5\uc815 \uacfc\uc815 \uc911\uc5d0 \uc788\ub294 3\ubc88\uc758 baking \uc911\uc5d0 \uc81c \uacbd\ud5d8\uc0c1 PEB\uac00 \uac00\uc7a5 \ubbfc\uac10\ud588\ub294\ub370 \uadf8 \uc774\uc720\ub294 PR profile\uc5d0 \uc601\ud5a5\uc744 \uc8fc\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image636_fadaa1-04.kb-image-is-ratio-size, .kb-image636_fadaa1-04 .kb-image-is-ratio-size{max-width:650px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_fadaa1-04.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_fadaa1-04 .kb-image-is-ratio-size{align-self:unset;}.kb-image636_fadaa1-04 figure{max-width:650px;}.kb-image636_fadaa1-04 .image-is-svg, .kb-image636_fadaa1-04 .image-is-svg img{width:100%;}.kb-image636_fadaa1-04 .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_fadaa1-04 img.kb-img, .kb-image636_fadaa1-04 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_fadaa1-04.kb-image-is-ratio-size, .kb-image636_fadaa1-04 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image636_fadaa1-04 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_fadaa1-04\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/c0njsT\/btspk8tnbL4\/kTpfK5FkMWxAHmspz9jUI0\/img.png\" alt=\"SEM \uc0ac\uc9c4\" class=\"kb-img\"\/><figcaption>SEM \uc0ac\uc9c4<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc704 \uc0ac\uc9c4\uc740 \ud3ec\ud1a0 \uacf5\uc815 \ud6c4 Profile\uc744 SEM\uc73c\ub85c \ucc0d\uc740 \uc0ac\uc9c4\uc785\ub2c8\ub2e4. \uc67c\ucabd\uc758 \uacbd\uc6b0 \ud328\ud130\ub2dd \ub41c 1\u339b PR \uc704\uc5d0 TiN 60nm\ub97c \uc99d\ucc29\ud55c \uc0ac\uc9c4\uc785\ub2c8\ub2e4. \ubcbd\uba74\uc774 \ub9e4\uc6b0 \ubd88\uaddc\uce59\ud55c \uac83\uc744 \ud655\uc778\ud560 \uc218 \uc788\ub294\ub370\uc694, \uc5ec\ub7ec \uac00\uc9c0 \uc6d0\uc778\uc774 \uc788\uc9c0\ub9cc \uadf8\uc911 \ud558\ub098\uac00 PR \ubcbd\uba74\uc774 \uc548\uc815\ud558\uc9c0 \uc54a\uc558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc624\ub978\ucabd \uc0ac\uc9c4\uc740 PEB \ucc98\ub9ac\ub97c \uc81c\ub300\ub85c \ud558\uc9c0 \uc54a\uc558\uc744 \ub54c\uc758 PR Profile\uc785\ub2c8\ub2e4. \uad49\uc7a5\ud788 \uc6b8\ud241\ubd88\ud241\ud55c\ub370\uc694, \uadf8 \uc774\uc720\ub294 standing wave \ub54c\ubb38\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Standing wave (\uc815\uc0c1\ud30c \ud6a8\uacfc)<\/h3>\n\n\n\n<p>\ud30c\ub3d9\uc774 \uc911\ucca9\ub420 \ub54c \ubcf4\uac15 \uac04\uc12d, \ub610\ub294 \uc0c1\uc1c4 \uac04\uc12d\uc774 \uc77c\uc5b4\ub0a9\ub2c8\ub2e4.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\ubcf4\uac15 \uac04\uc12d: \ub450 \ud30c\ub3d9\uc758 \uc704\uc0c1\uc774 \uac19\uc744 \ub54c \uc9c4\ud3ed\uc774 \ucee4\uc9c0\ub294 \uac04\uc12d<\/strong><\/li>\n\n\n\n<li><strong>\uc0c1\uc1c4 \uac04\uc12d: \ub450 \ud30c\ub3d9\uc758 \uc704\uc0c1\uc774 \ubc18\ub300\uc77c \ub54c \uc9c4\ud3ed\uc774 \uc904\uc5b4\ub4dc\ub294 \uac04\uc12d<\/strong><\/li>\n<\/ul>\n\n\n<style>.kb-image636_bf4f0a-01.kb-image-is-ratio-size, .kb-image636_bf4f0a-01 .kb-image-is-ratio-size{max-width:400px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_bf4f0a-01.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_bf4f0a-01 .kb-image-is-ratio-size{align-self:unset;}.kb-image636_bf4f0a-01 figure{max-width:400px;}.kb-image636_bf4f0a-01 .image-is-svg, .kb-image636_bf4f0a-01 .image-is-svg img{width:100%;}.kb-image636_bf4f0a-01 .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_bf4f0a-01 img.kb-img, .kb-image636_bf4f0a-01 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_bf4f0a-01.kb-image-is-ratio-size, .kb-image636_bf4f0a-01 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image636_bf4f0a-01 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_bf4f0a-01\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/cc7mhd\/btspjV8KNrd\/gDDWSQfqSHY2yjTc2Qkr7k\/img.jpg\" alt=\"\uac04\uc12d \uc124\uba85\" class=\"kb-img\"\/><figcaption>\uc67c\ucabd : \ubcf4\uac15 \uac04\uc12d, \uc624\ub978\ucabd : \uc0c1\uc1c4 \uac04\uc12d<\/figcaption><\/figure><\/div>\n\n\n\n<p>\ube5b \ub610\ud55c \ud30c\ub3d9\uc758 \uc131\uc9c8\uc744 \uac00\uc9c0\uace0 \uc788\uae30 \ub54c\ubb38\uc5d0 \uc9c4\ud589\ud558\ub2e4\uac00 \ubc18\uc0ac\ub418\uc5b4 \ub098\uc624\uba74 \uc9c4\ud589\ud558\ub294 \ube5b\uacfc \ubc18\uc0ac\ub418\uc5b4 \ub098\uc624\ub294 \ube5b\uc774 \uac04\uc12d\ud604\uc0c1\uc744 \uc77c\uc73c\ud0b5\ub2c8\ub2e4. \uadf8 \uacb0\uacfc, \ud30c\ub3d9\uc774 \uc81c\uc790\ub9ac\uc5d0\uc11c \uc9c4\ub3d9\ud558\ub294 \uac83\ucc98\ub7fc \ubcf4\uc774\ub294 \ud604\uc0c1\uc744 \ub098\ud0c0\ub0b4\ub294\ub370 \uc774\ub97c \uc815\uc0c1\ud30c\ub77c\uace0 \ud569\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image636_d98fa4-fd.kb-image-is-ratio-size, .kb-image636_d98fa4-fd .kb-image-is-ratio-size{max-width:650px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_d98fa4-fd.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_d98fa4-fd .kb-image-is-ratio-size{align-self:unset;}.kb-image636_d98fa4-fd figure{max-width:650px;}.kb-image636_d98fa4-fd .image-is-svg, .kb-image636_d98fa4-fd .image-is-svg img{width:100%;}.kb-image636_d98fa4-fd .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_d98fa4-fd img.kb-img, .kb-image636_d98fa4-fd .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_d98fa4-fd.kb-image-is-ratio-size, .kb-image636_d98fa4-fd .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image636_d98fa4-fd figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_d98fa4-fd\"><figure class=\"aligncenter\"><a href=\"resources.pcb.cadence.com\" class=\"kb-advanced-image-link\" target=\"_blank\" rel=\"noopener noreferrer\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/PRIVw\/btspl7AFuG0\/9pKaGWTB4lvsBgnVwkO8I0\/img.png\" alt=\"Standing wave\" class=\"kb-img\"\/><\/a><figcaption>Standing wave<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc704 \uadf8\ub9bc\uc5d0\uc11c \ubcfc \uc218 \uc788\ub4ef\uc774 \uc0c1\uc1c4 \uac04\uc12d\uc774 \uc77c\uc5b4\ub098\ub294 Node\uc758 \uacbd\uc6b0 \ub2e4\ub978 \uc9c0\uc810\ubcf4\ub2e4 \uc9c4\ud3ed\uc758 \ucc28\uc774\uac00 \ud070 \uac83\uc744 \uc54c \uc218 \uc788\uc2b5\ub2c8\ub2e4. PR \uc785\uc7a5\uc5d0\uc11c \uc790\uc678\uc120\uc774 \uc6e8\uc774\ud37c\uc5d0 \ubc18\uc0ac\ub418\uc5b4 \uc774\ub7ec\ud55c \uc815\uc0c1\ud30c \ud604\uc0c1\uc774 \uc77c\uc5b4\ub098\uba74&nbsp;Develop \ud6c4\uc5d0&nbsp;\ubb3c\uacb0\ubb34\ub2ac\ucc98\ub7fc \uc6b8\ud241\ubd88\ud241\ud55c profile\uc774 \ud615\uc131\ub429\ub2c8\ub2e4. PEB\ub294 \uc815\uc0c1\ud30c \ud6a8\uacfc\ub85c \uc778\ud574 PR \ub0b4\ubd80\uc5d0 \uace0\ub974\uac8c \ubc18\uc751\ub418\uc9c0 \ubabb\ud55c PAC(Photo Active Compound)\ub97c PR \uc804\uccb4\uc801\uc73c\ub85c \uace0\ub974\uac8c \ud655\uc0b0\uc2dc\ud0a4\ub294 \uc791\uc5c5\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\ubb3c\ub860 \uc800\ud76c\ub294 \uc774\ud6c4\uc5d0 \uc124\uba85\ud560 Lift-off \ubc29\uc2dd\uc744 \uc4f0\ub294\ub370, PR \ub450\uaed8\uac00 1\u339b\uc774\uace0 \uc99d\ucc29\ud558\ub294 \ubc15\ub9c9\uc740 10~50nm\ubc16\uc5d0 \uc548 \ub3fc\uc11c PR profile\uc774 \ud06c\uac8c \ubb38\uc81c\uac00 \ub418\uc9c0 \uc54a\uc744 \uac81\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \uc815\uc0c1\uc801\uc778 \uacf5\uc815 \ud658\uacbd\uc774 \uc544\ub2c8\uae30 \ub54c\ubb38\uc5d0 \ub808\uc2dc\ud53c\ub97c \ucd5c\uc801\ud654\ud558\uae30\ub85c \ud588\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc6d0\ub798 \uc0ac\uc6a9\ud558\ub358 PEB \uacf5\uc815 \ub808\uc2dc\ud53c\ub294 100\ub3c4\uc5d0\uc11c 2\ubd84 \ub3d9\uc548 baking\uc744 \ud588\ub294\ub370 120\ub3c4\ub85c \uc628\ub3c4\ub97c \uc62c\ub9ac\ub2c8 standing wave \ud604\uc0c1\uc744 \uc644\ud654\ud560 \uc218 \uc788\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image636_76fc0e-5f.kb-image-is-ratio-size, .kb-image636_76fc0e-5f .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_76fc0e-5f.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_76fc0e-5f .kb-image-is-ratio-size{align-self:unset;}.kb-image636_76fc0e-5f figure{max-width:500px;}.kb-image636_76fc0e-5f .image-is-svg, .kb-image636_76fc0e-5f .image-is-svg img{width:100%;}.kb-image636_76fc0e-5f .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_76fc0e-5f img.kb-img, .kb-image636_76fc0e-5f .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_76fc0e-5f.kb-image-is-ratio-size, .kb-image636_76fc0e-5f .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image636_76fc0e-5f figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_76fc0e-5f\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/o6g2w\/btspmfFlpaz\/vr36usie7pdgwuEbDcEfLK\/img.png\" alt=\"PEB \uc870\uac74 \ubcc0\uacbd \ud6c4 PR profile \uc0ac\uc9c4\" class=\"kb-img\"\/><figcaption>PEB \uc870\uac74 \ubcc0\uacbd \ud6c4 PR profile \uc0ac\uc9c4<\/figcaption><\/figure><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">ARC (Anti Reflective Coating)<\/h3>\n\n\n\n<p>\ud3ec\ud1a0 \uacf5\uc815 \uc911\uc758 standing wave \ud604\uc0c1\uc740 \uc790\uc678\uc120\uc774 \uc6e8\uc774\ud37c\uc5d0 \ubc18\uc0ac\ub418\uae30 \ub54c\ubb38\uc5d0 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. PEB \uc678\uc5d0 standing wave\ub97c \ucd5c\uc18c\ud654\ud558\ub294 \ubc29\ubc95\uc774 \uc788\ub294\ub370 \ubc14\ub85c \ubc18\uc0ac\ubc29\uc9c0\ub9c9\uc744 \ucf54\ud305\ud558\ub294 \uac81\ub2c8\ub2e4(ARC). \ud3ec\ud1a0 \uacf5\uc815 \uc804\uc5d0 CVD \ubc29\ubc95\uc73c\ub85c SiON \uac19\uc740 \ubc18\uc0ac\ubc29\uc9c0\ub9c9\uc744 \uc99d\ucc29\ud558\uc5ec standing wave \ud604\uc0c1\uc744 \ubc29\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Lift-off<\/h2>\n\n\n\n<p>Lift-off \uacf5\uc815\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \uc21c\uc11c\ub85c \uc9c4\ud589\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li>\ud3ec\ud1a0 \uacf5\uc815\uc744 \ud1b5\ud55c \ud328\ud130\ub2dd<\/li>\n\n\n\n<li>\ud328\ud130\ub2dd \ub41c substrate \uc704\uc5d0 \uc99d\ucc29<\/li>\n\n\n\n<li>PR \uc81c\uac70 (lift-off)<\/li>\n<\/ol>\n\n\n<style>.kb-image636_aad5d3-d1.kb-image-is-ratio-size, .kb-image636_aad5d3-d1 .kb-image-is-ratio-size{max-width:650px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_aad5d3-d1.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_aad5d3-d1 .kb-image-is-ratio-size{align-self:unset;}.kb-image636_aad5d3-d1 figure{max-width:650px;}.kb-image636_aad5d3-d1 .image-is-svg, .kb-image636_aad5d3-d1 .image-is-svg img{width:100%;}.kb-image636_aad5d3-d1 .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_aad5d3-d1 img.kb-img, .kb-image636_aad5d3-d1 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_aad5d3-d1.kb-image-is-ratio-size, .kb-image636_aad5d3-d1 .kb-image-is-ratio-size{max-width:300px;width:100%;}.kb-image636_aad5d3-d1 figure{max-width:300px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_aad5d3-d1\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/c2yjQv\/btspsU8J26O\/ddcWm5d4DKqOBhGXDsEJu1\/img.png\" alt=\"Lift off \uacfc\uc815\" class=\"kb-img\"\/><figcaption>Lift off \uacfc\uc815<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc800\ud76c\ub294 \uc99d\ucc29\uae4c\uc9c0 \uc644\ub8cc\ub41c substrate\ub97c \uc544\uc138\ud1a4 \uc6a9\uc561\uc5d0 \ub2f4\uac00 PR\uc744 \ub0a0\ub9ac\ub294 \ubc29\uc2dd\uc744 lift-off\ub97c \uc9c4\ud589\ud588\uc2b5\ub2c8\ub2e4. Lift-off \uacfc\uc815\uc5d0\uc11c\ub294 Negative PR\uc744 \uc0ac\uc6a9\ud558\ub294 \uac83\uc774 \uc88b\uc740\ub370\uc694, \uadf8 \uc774\uc720\ub294 PR profile \ub54c\ubb38\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uadf8\ub7ec\uba74 \uc774 \ubc29\uc2dd\uc73c\ub85c \ud328\ud130\ub2dd\uc744 \ud560 \ub54c profile\uc5d0 \uc5b4\ub5a4 \ubb38\uc81c\uac00 \ubc1c\uc0dd\ud560 \uc218 \uc788\ub294\uc9c0 \uc54c\uc544\ubcf4\uaca0\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Lift-off issue<\/h3>\n\n\n\n<p>\uba3c\uc800 \uc544\ub798 \uadf8\ub9bc\uc744 \ubcfc\uae4c\uc694?<\/p>\n\n\n<style>.kb-image636_73896d-4b.kb-image-is-ratio-size, .kb-image636_73896d-4b .kb-image-is-ratio-size{max-width:650px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_73896d-4b.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_73896d-4b .kb-image-is-ratio-size{align-self:unset;}.kb-image636_73896d-4b figure{max-width:650px;}.kb-image636_73896d-4b .image-is-svg, .kb-image636_73896d-4b .image-is-svg img{width:100%;}.kb-image636_73896d-4b .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_73896d-4b img.kb-img, .kb-image636_73896d-4b .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_73896d-4b.kb-image-is-ratio-size, .kb-image636_73896d-4b .kb-image-is-ratio-size{max-width:300px;width:100%;}.kb-image636_73896d-4b figure{max-width:300px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_73896d-4b\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/pGhxI\/btsppHPmNcW\/kca5CAAGUmZ7Je2kRxyR91\/img.png\" alt=\"\uc99d\ucc29 \ud6c4 Profile (\uc88c) Positive PR (\uc6b0) Negative PR\" class=\"kb-img\"\/><figcaption>\uc99d\ucc29 \ud6c4 Profile (\uc88c) Positive PR (\uc6b0) Negative PR<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc544\uc138\ud1a4\uc73c\ub85c PR\uc744 \ub0a0\ub9ac\uae30 \uc804 \uc0c1\ud669\uc778\ub370\uc694, PR\uc758 \uc885\ub958\uc5d0 \ub530\ub77c \ud3ec\ud1a0 \uacf5\uc815 \ud6c4 \uc704\uc640 \uac19\uc740 profile\uc744 \ubcf4\uc785\ub2c8\ub2e4. Positive PR\uc758 \uacbd\uc6b0 PR \ubcbd\uba74\uc5d0\ub3c4 \uc99d\ucc29\uc774 \ub418\uc5b4 \uc2e4\uc81c wafer \uc704\uc5d0 \uc99d\ucc29\ub41c \ubc15\ub9c9\uacfc \uc5f0\uacb0\ub418\uc5b4 PR\uc774 \uc81c\uac70\ub420 \ub54c \ubb38\uc81c\uac00 \uc0dd\uae41\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image636_a9d858-b6.kb-image-is-ratio-size, .kb-image636_a9d858-b6 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_a9d858-b6.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_a9d858-b6 .kb-image-is-ratio-size{align-self:unset;}.kb-image636_a9d858-b6 figure{max-width:500px;}.kb-image636_a9d858-b6 .image-is-svg, .kb-image636_a9d858-b6 .image-is-svg img{width:100%;}.kb-image636_a9d858-b6 .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_a9d858-b6 img.kb-img, .kb-image636_a9d858-b6 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_a9d858-b6.kb-image-is-ratio-size, .kb-image636_a9d858-b6 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image636_a9d858-b6 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_a9d858-b6\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/B9S6M\/btsplLrsesg\/nKTdcLG8CDYmGJYRi4yAgk\/img.png\" alt=\"Negative PR\ub85c \ud328\ud130\ub2dd \ud6c4 \uc99d\ucc29 \uc0ac\uc9c4, SEM\" class=\"kb-img\"\/><figcaption>Negative PR\ub85c \ud328\ud130\ub2dd \ud6c4 \uc99d\ucc29 \uc0ac\uc9c4, SEM<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc704\uc758 \uc0ac\uc9c4\uc744 \ubcf4\uc2dc\uba74 Negative PR\uc744 \uc0ac\uc6a9\ud588\uc744 \ub54c(\uc815\ud655\ud788\ub294 Positive PR\uc744 \uc4f0\uace0 Flood-Exposure \uacfc\uc815\uc744 \uac70\ucce4\uc2b5\ub2c8\ub2e4) PR profile\uc744 \ud655\uc778\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \uc5ec\uc804\ud788 PR \ubcbd\uba74\uc5d0 \ubc15\ub9c9\uc774 \uc99d\ucc29\ub418\uc5b4 substrate\uae4c\uc9c0 \uc774\uc5b4\uc9c4 \uac83\uc744 \ud655\uc778\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uacbd\uc6b0 PR\uc744 \ub5bc\uc5b4\ub0b4\uba74 \ubc15\ub9c9\uc758 edge\uc5d0\uc11c \uc774\uc288\uac00 \ubc1c\uc0dd\ud569\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image636_d66700-6f.kb-image-is-ratio-size, .kb-image636_d66700-6f .kb-image-is-ratio-size{max-width:650px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_d66700-6f.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_d66700-6f .kb-image-is-ratio-size{align-self:unset;}.kb-image636_d66700-6f figure{max-width:650px;}.kb-image636_d66700-6f .image-is-svg, .kb-image636_d66700-6f .image-is-svg img{width:100%;}.kb-image636_d66700-6f .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_d66700-6f img.kb-img, .kb-image636_d66700-6f .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_d66700-6f.kb-image-is-ratio-size, .kb-image636_d66700-6f .kb-image-is-ratio-size{max-width:300px;width:100%;}.kb-image636_d66700-6f figure{max-width:300px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_d66700-6f\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/qCkAn\/btspsVGzyM5\/eiszcw8VJd6Bcc2LEt4ZIk\/img.png\" alt=\"\uc99d\ucc29\ub41c \ubc15\ub9c9 AFM \uc0ac\uc9c4\" class=\"kb-img\"\/><figcaption>\uc99d\ucc29\ub41c \ubc15\ub9c9 AFM \uc0ac\uc9c4<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc704 \uc0ac\uc9c4\uc740 lift-off \uacf5\uc815\uc744 \ub9c8\uce5c \ud6c4 \ubc15\ub9c9\uc744 AFM(atomic force microscopy)\uc744 non contact mode\ub85c \uc124\uc815\ud558\uace0 \ucc0d\uc740 \uc0ac\uc9c4\uc785\ub2c8\ub2e4. \ubc15\ub9c9\uc774 \uc88c\uc6b0\ub85c \uae38\uac8c line \ud615\ud0dc\ub85c \uc99d\ucc29\ub41c \uc0c1\ud669\uc778\ub370\uc694, edge \ubd80\ubd84\uc774 \ubb38\uc81c\uac00 \ub9ce\uc544 \ubcf4\uc774\uc8e0?? SEM\uc5d0\uc11c\ub3c4 \ud655\uc778\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image636_60a38d-20.kb-image-is-ratio-size, .kb-image636_60a38d-20 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_60a38d-20.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_60a38d-20 .kb-image-is-ratio-size{align-self:unset;}.kb-image636_60a38d-20 figure{max-width:500px;}.kb-image636_60a38d-20 .image-is-svg, .kb-image636_60a38d-20 .image-is-svg img{width:100%;}.kb-image636_60a38d-20 .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_60a38d-20 img.kb-img, .kb-image636_60a38d-20 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_60a38d-20.kb-image-is-ratio-size, .kb-image636_60a38d-20 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image636_60a38d-20 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_60a38d-20\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/4x6KN\/btspxbbgtZ1\/UrTVD2NJoYzRSimT4BBJN1\/img.png\" alt=\"Lift-off \ud6c4 SEM \uc0ac\uc9c4\" class=\"kb-img\"\/><figcaption>Lift-off \ud6c4 SEM \uc0ac\uc9c4<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc774\ub7f0 \uacf5\uc815\uc740 \uc0ac\uc6a9\ud560 \uc218 \uc5c6\uaca0\uc8e0,,,,, \uadf8\ub798\uc11c LOR \uc774\ub77c\uace0 \ud558\ub294 chemical\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">LOR \ucf54\ud305<\/h3>\n\n\n\n<p>LOR\uc740 PR \ucf54\ud305 \uc804\uc5d0 \uc6e8\uc774\ud37c \uc704\uc5d0 \ucf54\ud305\ud558\ub294 \ubc29\uc2dd\uc73c\ub85c \uc0ac\uc6a9\ud558\ub294\ub370\uc694, wafer\uc640 PR\uc758 gap\uc744 \ub9cc\ub4e4\uc5b4\uc8fc\ub294 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image636_b5df5c-44.kb-image-is-ratio-size, .kb-image636_b5df5c-44 .kb-image-is-ratio-size{max-width:650px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_b5df5c-44.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_b5df5c-44 .kb-image-is-ratio-size{align-self:unset;}.kb-image636_b5df5c-44 figure{max-width:650px;}.kb-image636_b5df5c-44 .image-is-svg, .kb-image636_b5df5c-44 .image-is-svg img{width:100%;}.kb-image636_b5df5c-44 .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_b5df5c-44 img.kb-img, .kb-image636_b5df5c-44 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_b5df5c-44.kb-image-is-ratio-size, .kb-image636_b5df5c-44 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image636_b5df5c-44 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_b5df5c-44\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/bAFgCq\/btspsWlbUdE\/GhEVJkKYMv6GKO7tB3wL41\/img.png\" alt=\"LOR\uc744 \uc0ac\uc6a9\ud588\uc744 \ub54c PR profile\" class=\"kb-img\"\/><figcaption>LOR\uc744 \uc0ac\uc6a9\ud588\uc744 \ub54c PR profile<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc704 \uc0ac\uc9c4\uc744 \ubcf4\uc2dc\uba74 1.5\u339b \ub450\uaed8\uc758 PR \ubc11\uc5d0 200nm \uce35\uc774 \uc788\ub294 \uac83\uc744 \uc54c \uc218 \uc788\ub294\ub370\uc694, \uc774\uac83\uc774 LOR \uc785\ub2c8\ub2e4. PR\uc740 \uc790\uc678\uc120\uc744 \ube44\ucdb0\uc11c \uc131\uc9c8\uc744 \ubc14\uafb8\uace0 developer\uc5d0 \ub179\uac70\ub098 \ub179\uc9c0 \uc54a\ub294 \ubd80\ubd84\uc73c\ub85c \ub098\ub220\uc9c0\ub294\ub370\uc694, LOR\uc740 \uc790\uc678\uc120\uc5d0 \uc601\ud5a5\uc744 \ubc1b\uc9c0 \uc54a\uace0 developer\uc5d0 \ub179\uc2b5\ub2c8\ub2e4. \uadf8\ub798\uc11c \uc81c\uac70\ub418\uc9c0 \uc54a\ub294 PR \ubc11\uc73c\ub85c\ub3c4 developer\uac00 \uce68\ud22c\ud558\uc5ec LOR\uc774 lateral \ud558\uac8c etch \ub418\ub294 \uac81\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc8fc\uc758\ud560 \uc810\uc740 LOR\uc744 \uc0ac\uc6a9\ud560 \ub54c\ub294 develop time\uc744 \uc815\ud655\ud558\uac8c \uc9c0\ucf1c\uc57c \ud55c\ub2e4\ub294 \uac81\ub2c8\ub2e4. \ub108\ubb34 \uc624\ub798 developer\uc5d0 \ub2f4\uadf8\uba74 LOR\uc774 \ub108\ubb34 \ub9ce\uc774 etch \ub418\uc5b4 PR\uc774 \uae30\uc6b8\uc5b4\uc9c0\uace0, \ubb34\ub108\uc9c0\uae30\ub3c4 \ud569\ub2c8\ub2e4. \ub610\ud55c LOR\uc774 200nm\ubc16\uc5d0 \ub418\uc9c0 \uc54a\uc544\uc11c(\ubb3c\ub860 \uc2a4\ud540 \ucf54\ud305 \ud560 \ub54c rpm\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9c0\uc9c0\ub9cc) \uadf8 \uc774\uc0c1 \uc99d\ucc29\ud558\ub294 \uacbd\uc6b0\ub294 LOR\uc744 \uc4f0\ub294 \uc758\ubbf8\uac00 \uc5c6\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image636_599d0f-59.kb-image-is-ratio-size, .kb-image636_599d0f-59 .kb-image-is-ratio-size{max-width:650px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_599d0f-59.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image636_599d0f-59 .kb-image-is-ratio-size{align-self:unset;}.kb-image636_599d0f-59 figure{max-width:650px;}.kb-image636_599d0f-59 .image-is-svg, .kb-image636_599d0f-59 .image-is-svg img{width:100%;}.kb-image636_599d0f-59 .kb-image-has-overlay:after{opacity:0.3;}.kb-image636_599d0f-59 img.kb-img, .kb-image636_599d0f-59 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image636_599d0f-59.kb-image-is-ratio-size, .kb-image636_599d0f-59 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image636_599d0f-59 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image636_599d0f-59\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/cQGnIe\/btspg1aLE8x\/SpzaW15THnHaQWKAQTC0VK\/img.png\" alt=\"OM \uc0ac\uc9c4\" class=\"kb-img\"\/><figcaption>OM \uc0ac\uc9c4<\/figcaption><\/figure><\/div>\n\n\n<style>.kadence-column636_0f8fc9-a5 > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column636_0f8fc9-a5 > .kt-inside-inner-col,.kadence-column636_0f8fc9-a5 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column636_0f8fc9-a5 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column636_0f8fc9-a5 > .kt-inside-inner-col{flex-direction:column;}.kadence-column636_0f8fc9-a5 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column636_0f8fc9-a5 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column636_0f8fc9-a5{position:relative;}@media all and (max-width: 1024px){.kadence-column636_0f8fc9-a5 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column636_0f8fc9-a5 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column636_0f8fc9-a5\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-photolithography\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/aligner-overview\/\">Aligner \uc774\ud574 \u2013 \uad6c\uc870\uc640 \uc791\ub3d9 \ubc29\uc2dd, \uc774\uc288<\/a><\/p>\n<\/div><\/div>\n\n\n\n<p>\ucc38\uace0: <a href=\"https:\/\/news.skhynix.co.kr\/post\/the-bottom-part-of-the-photo-process\" target=\"_blank\" rel=\"noopener\">SK hynix \ubc18\ub3c4\uccb4 \ud2b9\uac15<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>In this article, I will talk about what I experienced while working on the photo process during my master\u2019s degree\u2026<\/p>","protected":false},"author":1,"featured_media":637,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[3],"tags":[42,28],"class_list":["post-636","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-semiconductor-process-and-device","tag-42","tag-semiconductor"],"_links":{"self":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/636","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/comments?post=636"}],"version-history":[{"count":3,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/636\/revisions"}],"predecessor-version":[{"id":675,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/636\/revisions\/675"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media\/637"}],"wp:attachment":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media?parent=636"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/categories?post=636"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/tags?post=636"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}<!-- This website is optimized by Airlift. Learn more: https://airlift.net. Template:. Learn more: https://airlift.net. Template: 69b92da9d36f73cd2808d6e8. Config Timestamp: 2026-03-17 10:32:09 UTC, Cached Timestamp: 2026-04-18 13:16:38 UTC -->