{"id":577,"date":"2024-08-05T12:43:15","date_gmt":"2024-08-05T03:43:15","guid":{"rendered":"https:\/\/rtlearner.com\/?p=577"},"modified":"2025-12-24T12:08:09","modified_gmt":"2025-12-24T03:08:09","slug":"semiconductor-process-photolithography","status":"publish","type":"post","link":"https:\/\/rtlearner.com\/en\/semiconductor-process-photolithography\/","title":{"rendered":"[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)"},"content":{"rendered":"\n<p>\uc774\ubc88\uc5d0\ub294 Photolithography(\ud3ec\ud1a0 \uacf5\uc815)\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uaca0\uc2b5\ub2c8\ub2e4. \uba3c\uc800 \uacf5\uc815\uc758 \uc804\uccb4\uc801\uc778 \uc21c\uc11c\ub97c \uc124\uba85\ud558\uaca0\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-table-of-content-nav.kb-table-of-content-id577_cc2016-9c .kb-table-of-content-wrap{padding-top:var(--global-kb-spacing-sm, 1.5rem);padding-right:var(--global-kb-spacing-sm, 1.5rem);padding-bottom:var(--global-kb-spacing-sm, 1.5rem);padding-left:var(--global-kb-spacing-sm, 1.5rem);box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kb-table-of-content-nav.kb-table-of-content-id577_cc2016-9c .kb-table-of-contents-title-wrap{padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.kb-table-of-content-nav.kb-table-of-content-id577_cc2016-9c .kb-table-of-contents-title{font-weight:regular;font-style:normal;}.kb-table-of-content-nav.kb-table-of-content-id577_cc2016-9c .kb-table-of-content-wrap .kb-table-of-content-list{font-weight:regular;font-style:normal;margin-top:var(--global-kb-spacing-sm, 1.5rem);margin-right:0px;margin-bottom:0px;margin-left:0px;}@media all and (max-width: 767px){.kb-table-of-content-nav.kb-table-of-content-id577_cc2016-9c .kb-table-of-contents-title{font-size:var(--global-kb-font-size-md, 1.25rem);}.kb-table-of-content-nav.kb-table-of-content-id577_cc2016-9c .kb-table-of-content-wrap .kb-table-of-content-list{font-size:var(--global-kb-font-size-sm, 0.9rem);}}<\/style>\n\n<style>.kadence-column577_c87a5a-38 > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column577_c87a5a-38 > .kt-inside-inner-col,.kadence-column577_c87a5a-38 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column577_c87a5a-38 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column577_c87a5a-38 > .kt-inside-inner-col{flex-direction:column;}.kadence-column577_c87a5a-38 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column577_c87a5a-38 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column577_c87a5a-38{position:relative;}@media all and (max-width: 1024px){.kadence-column577_c87a5a-38 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column577_c87a5a-38 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column577_c87a5a-38\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-oxidation\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc0b0\ud654 \uacf5\uc815 (Oxidation)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-etching\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc2dd\uac01 \uacf5\uc815 (Etching)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-deposition\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc99d\ucc29 \uacf5\uc815 (Deposition)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-doping\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ub3c4\ud551 \uacf5\uc815 (Doping)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-cleaning\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc138\uc815 \uacf5\uc815 (Cleaning)<\/a><\/p>\n<\/div><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Photolithography \uc21c\uc11c<\/h2>\n\n\n<style>.kb-image577_88c0d5-83.kb-image-is-ratio-size, .kb-image577_88c0d5-83 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_88c0d5-83.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_88c0d5-83 .kb-image-is-ratio-size{align-self:unset;}.kb-image577_88c0d5-83 figure{max-width:500px;}.kb-image577_88c0d5-83 .image-is-svg, .kb-image577_88c0d5-83 .image-is-svg img{width:100%;}.kb-image577_88c0d5-83 .kb-image-has-overlay:after{opacity:0.3;}.kb-image577_88c0d5-83 img.kb-img, .kb-image577_88c0d5-83 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image577_88c0d5-83.kb-image-is-ratio-size, .kb-image577_88c0d5-83 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image577_88c0d5-83 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image577_88c0d5-83\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/rorcK\/btslA8KU2RL\/xgQ71q6CGt1YsCzCcf9G1K\/img.png\" alt=\"Photo-lithography \uc21c\uc11c\" class=\"kb-img\"\/><figcaption>Photo-lithography \uc21c\uc11c<\/figcaption><\/figure><\/div>\n\n\n\n<p>Photo-lithography \uacf5\uc815\uc744 \ud06c\uac8c \ub098\ub220\ubcf4\uba74 \uac10\uad11\uc81c(PR, photoresist)\ub97c \ucf54\ud305\ud558\uace0, Mask\ub97c \uc0ac\uc6a9\ud574 \uc790\uc678\uc120\uc744 \ube44\ucd98 \ub4a4, \ud604\uc0c1(Develop)\uc744 \ud1b5\ud574 \ud544\uc694\ud558\uc9c0 \uc54a\uc740 PR\uc744 \ub0a0\ub9ac\ub294 \uacfc\uc815\uc73c\ub85c \uc774\ub8e8\uc5b4\uc838 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub7fc, \uac01\uac01\uc758 \uacfc\uc815\uc744 \uc790\uc138\ud788 \uc54c\uc544\ubcfc\uae4c\uc694??<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\ud45c\uba74\ucc98\ub9ac (Surface preparation)<\/h3>\n\n\n\n<p>Wafer cleaning\uc744 \ub05d\ub0b4\uace0 photo-lithography \uacf5\uc815\uc744 \uc704\ud574 PR\uc744 \ub3c4\ud3ec\ud558\uae30 \uc804, wafer \ud45c\uba74\uc744 \uc18c\uc218\uc131\uc73c\ub85c \ubc14\uafd4\uc918\uc57c \ud569\ub2c8\ub2e4. \uc65c\ub0d0\ud558\uba74 PR\uc774 \uc18c\uc218\uc131\uc774\uae30 \ub54c\ubb38\uc778\ub370\uc694, wafer\ub97c \uc18c\uc218\uc131\uc73c\ub85c \ubc14\uafd4\uc90c\uc73c\ub85c\uc368 PR\uc758 \uc811\ucc29\ub825\uc744 \ud5a5\uc0c1\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ucc98\ub9ac\ub294 HMDS(HexaMethylDiSilazane) \uc99d\uae30\uc5d0 \ub178\ucd9c\ud574\uc11c \uc9c4\ud589\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image577_b17155-91.kb-image-is-ratio-size, .kb-image577_b17155-91 .kb-image-is-ratio-size{max-width:650px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_b17155-91.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_b17155-91 .kb-image-is-ratio-size{align-self:unset;}.kb-image577_b17155-91 figure{max-width:650px;}.kb-image577_b17155-91 .image-is-svg, .kb-image577_b17155-91 .image-is-svg img{width:100%;}.kb-image577_b17155-91 .kb-image-has-overlay:after{opacity:0.3;}.kb-image577_b17155-91 img.kb-img, .kb-image577_b17155-91 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image577_b17155-91.kb-image-is-ratio-size, .kb-image577_b17155-91 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image577_b17155-91 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image577_b17155-91\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/6eK6H\/btslxKQ8IAu\/rXWvLm2b5L5q8a4H1c7BKk\/img.png\" alt=\"HMDS \ucc98\ub9ac\" class=\"kb-img\"\/><figcaption>HMDS \ucc98\ub9ac<\/figcaption><\/figure><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\uc2a4\ud540 \ucf54\ud305 (Spin coating)<\/h3>\n\n\n<style>.kb-image577_f4b06e-00.kb-image-is-ratio-size, .kb-image577_f4b06e-00 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_f4b06e-00.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_f4b06e-00 .kb-image-is-ratio-size{align-self:unset;}.kb-image577_f4b06e-00 figure{max-width:500px;}.kb-image577_f4b06e-00 .image-is-svg, .kb-image577_f4b06e-00 .image-is-svg img{width:100%;}.kb-image577_f4b06e-00 .kb-image-has-overlay:after{opacity:0.3;}.kb-image577_f4b06e-00 img.kb-img, .kb-image577_f4b06e-00 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image577_f4b06e-00.kb-image-is-ratio-size, .kb-image577_f4b06e-00 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image577_f4b06e-00 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image577_f4b06e-00\"><figure class=\"aligncenter\"><a href=\"https:\/\/www.keyence.co.kr\/ss\/products\/measure\/sealing\/coater-type\/spin.jsp\" class=\"kb-advanced-image-link\" target=\"_blank\" rel=\"noopener noreferrer\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/bcnwpJ\/btslC5sYuVu\/8Wby1X2Anu2t7xbUpB2RI1\/img.png\" alt=\"Spin coating \ubc29\ubc95\" class=\"kb-img\"\/><\/a><figcaption>Spin coating \ubc29\ubc95<\/figcaption><\/figure><\/div>\n\n\n\n<p>PR\uc740 \uc2a4\ud540 \ucf54\ud305(Spin Coating)\ubc29\uc2dd\uc73c\ub85c \ub3c4\ud3ec\ud569\ub2c8\ub2e4. \ucc98\uc74c\uc5d0\ub294 \uc800\uc18d\uc73c\ub85c \ud68c\uc804\ud558\uc5ec \uc6e8\uc774\ud37c (wafer)\uc804\uccb4\uc5d0 PR\uc774 \ub36e\uc774\ub3c4\ub85d \ud558\uace0, \uace0\uc18d\uc73c\ub85c \ud68c\uc804\ud558\uc5ec PR\uc774 \uc6d0\ud558\ub294 \ub450\uaed8\uac00 \ub418\ub3c4\ub85d \uc870\uc808\ud569\ub2c8\ub2e4. \uacf5\uc815\uc744 \uc548 \ud55c \uc9c0 1\ub144\uc774 \uc9c0\ub0ac\ub294\ub370, \uc81c \uae30\uc5b5\uc5d0 \uc800\ub294 500 rpm\uc73c\ub85c 20\ucd08, 5000 rpm\uc73c\ub85c 40\ucd08 \ub3cc\ub838\ub358 \uac78\ub85c \uae30\uc5b5\ud558\ub124\uc694.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Soft Bake<\/h3>\n\n\n\n<p>PR \ucf54\ud305 \ud6c4 PR\uc5d0 \ud3ec\ud568\ub41c \uc720\uae30\uc6a9\ub9e4(Solvent)\ub97c \uc81c\uac70\ud558\uae30 \uc704\ud574 baking\uc744 \ud569\ub2c8\ub2e4. PR\uc744 \uc57d\uac04 \uacbd\ud654\uc2dc\ud0a4\ub294 \uac74\ub370\uc694, \uc774\ub807\uac8c \ud568\uc73c\ub85c\uc368 \ud6c4\uc18d \ub178\uad11\uacf5\uc815(UV-exposure)\uc5d0\uc11c solvent\uac00 \uc99d\ubc1c\ud558\uc5ec Mask\ub098 \ub178\uad11\uc7a5\ube44\uc5d0 \uc545\uc601\ud5a5\uc744 \uc904 \uc218 \uc788\uace0 \ub178\uad11\uacf5\uc815\uc758 \ubbfc\uac10\ub3c4\ub97c \ub5a8\uc5b4\ub728\ub9b4 \uc218 \uc788\uac70\ub4e0\uc694.<\/p>\n\n\n\n<p>\uc800\ub294 Hot plate\uc5d0\uc11c 120\ub3c4\ub85c 2\ubd84\uac04 baking\uc744 \ud588\uc2b5\ub2c8\ub2e4. \uadf8 \uc774\uc720\ub294 \uc774\ud6c4\uc5d0 baking\uc774 \ub354 \uc788\ub294\ub370 \uacf5\uc815 \ub808\uc2dc\ud53c\ub97c \ud3b8\uc758\uc0c1 \ud1b5\uc77c\uc2dc\ucf30\uc5b4\uc694. \uc81c \uacbd\ud5d8\uc0c1 Soft Bake\ub294 resolution\uc5d0 \uadf8\ub807\uac8c \ud06c\uac8c \uc601\ud5a5\uc744 \uc8fc\uc9c4 \uc54a\uc558\ub358 \uac83\uc73c\ub85c \uae30\uc5b5\ud569\ub2c8\ub2e4. (\ubb3c\ub860 \uc800\ub294 nm\uae09 \uacf5\uc815\uc774 \uc544\ub2c8\uace0 5\u339b \ud328\ud134\uc744 \uc368\uc11c \uadf8\ub7ac\ub358 \uac78 \uc218\ub3c4 \uc788\uc5b4\uc694!!)<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Align &amp; Exposure<\/h3>\n\n\n\n<p>Soft Bake \ud6c4 \ub178\uad11\uacf5\uc815\uc744 \uc9c4\ud589\ud569\ub2c8\ub2e4. \ub178\uad11\uacf5\uc815 \uc2dc \uc0ac\uc6a9\ud558\ub294 \ube5b\uc740 \uc790\uc678\uc120\uc778\ub370\uc694, \uc774\ub294 PR\uc774 \uc790\uc678\uc120\uacfc \ubc18\uc751\ud558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \ubc29\uc1a1\uc5d0\uc11c \ubc18\ub3c4\uccb4 \uc774\uc57c\uae30\ub97c \ud560 \ub54c \uc0ac\ub78c\ub4e4\uc774 \ub178\ub780\ubd88\uc774 \ucf1c\uc838 \uc788\ub294 \ubc29\uc5d0\uc11c \uc77c\ud558\uace0 \uc788\ub294 \uc774\uc720\uac00 \ubc14\ub85c \uc774\uac83\uc778\ub370\uc694, \ub178\uad11\uacf5\uc815 \uc774\uc678\uc758 \ub2e8\uacc4\uc5d0\uc11c PR\uc774 \ubc18\uc751\ud558\ub294 \uac83\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \ud3ec\ud1a0 \uacf5\uc815\uc744 \ud560 \ub54c\ub294 \ub178\ub780 \ubd88\ube5b\ub9cc \uc0ac\uc6a9\ud569\ub2c8\ub2e4(\uc610\ub85c\uc6b0\ub8f8). \uadf8\ub798\uc11c \uc800\ud76c\ub3c4 \ud615\uad11\ub4f1\uc5d0 \ub178\ub780 \uc140\ub85c\ud310\uc9c0\ub97c \ubd99\uc600\uc5b4\uc694.<\/p>\n\n\n\n<p>\uc7a0\uae50 \ub2e4\ub978 \uc598\uae30\ub85c \uc0dc\ub294\ub370\uc694, \ub178\uad11\uacf5\uc815\uc744 \uc9c4\ud589\ud558\uae30 \uc804\uc5d0 \uc6b0\uc120 Align\uc774\ub77c\ub294 \uac83\uc744 \uba3c\uc800 \ud569\ub2c8\ub2e4. \ud55c\ubc88 \uce69\uc744 \ub9cc\ub4e4 \ub54c \ud3ec\ud1a0 \uacf5\uc815\uc744 20~25\ubc88 \uc815\ub3c4 \ud55c\ub2e4\uace0 \ud574\uc694. \ud328\ud130\ub2dd\ud558\uace0 \uc99d\ucc29\ud558\uace0, \ud328\ud130\ub2dd\ud558\uace0 \uc99d\ucc29\ud558\uace0, \uc774\uac78 \ubc18\ubcf5\ud574\uc57c \uc6d0\ud558\ub294 \ud68c\ub85c\ub300\ub85c \uce69\uc744 \ub9cc\ub4e4 \uc218 \uc788\ub294 \uac70\uc8e0. \uadf8\ub7ec\uba74 \uadf8\ub54c\ub9c8\ub2e4 \uac01 \uce35\uc758 \uc704\uce58\ub97c \uc815\ud655\ud558\uac8c \ub9de\ucdb0\uc57c \ud558\uaca0\uc8e0?? \uc774 \uacfc\uc815\uc774 Align \uc791\uc5c5\uc785\ub2c8\ub2e4. \ub300\ubd80\ubd84 \ud2b9\uc815 \uc704\uce58\uc5d0 Align key\uac00 \uc788\uc5b4\uc11c \uadf8\uac78 \ubcf4\uace0 \uc704\uce58\ub97c \ub9de\ucda5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image577_78c69f-69.kb-image-is-ratio-size, .kb-image577_78c69f-69 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_78c69f-69.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_78c69f-69 .kb-image-is-ratio-size{align-self:unset;}.kb-image577_78c69f-69 figure{max-width:500px;}.kb-image577_78c69f-69 .image-is-svg, .kb-image577_78c69f-69 .image-is-svg img{width:100%;}.kb-image577_78c69f-69 .kb-image-has-overlay:after{opacity:0.3;}.kb-image577_78c69f-69 img.kb-img, .kb-image577_78c69f-69 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image577_78c69f-69.kb-image-is-ratio-size, .kb-image577_78c69f-69 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image577_78c69f-69 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image577_78c69f-69\"><figure class=\"aligncenter\"><a href=\"www.halbleiter.org\" class=\"kb-advanced-image-link\" target=\"_blank\" rel=\"noopener noreferrer\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/xgs6h\/btslDY1qb8F\/jP8sKsYjSRfKmOlDho3UMk\/img.png\" alt=\"Align key\" class=\"kb-img\"\/><\/a><figcaption>Align key<\/figcaption><\/figure><\/div>\n\n\n\n<p>Align\uc774 \ub05d\ub098\uba74 UV Exposure\ub97c \uc9c4\ud589\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/rtlearner.com\/photolithography-issue-post-expose-baking-lift-off\/\">PEB (Post Exposure Bake)<\/a><\/h3>\n\n\n\n<p>\uc55e\uc5d0\uc11c \u2018\uc81c \uacbd\ud5d8\uc0c1\u2019 Soft Bake\ub294 \ud3ec\ud1a0 \uacf5\uc815\uc758 resolution\uc5d0 \ud06c\uac8c \uc601\ud5a5\uc744 \uc8fc\uc9c0\ub294 \uc54a\ub294 \uac83 \uac19\ub2e4\uace0 \ud588\ub294\ub370 PEB\ub294 \uc815\ub9d0 \uc911\uc694\ud569\ub2c8\ub2e4. Soft Bake\ubcf4\ub2e4 \ub192\uc740 \uc628\ub3c4(110~120\ub3c4)\uc5d0\uc11c \uc9c4\ud589\ud558\ub294\ub370\uc694, PR \ud328\ud134\uc744 \uade0\uc77c\ud558\uac8c \ub9cc\ub4e4\uae30 \uc704\ud574 \uc9c4\ud589\ud569\ub2c8\ub2e4. UV-Exposure \uacfc\uc815\uc5d0\uc11c PR\uc5d0 \uc0b0(acid)\uc774 \ubc1c\uc0dd\ud558\ub294\ub370\uc694, \uc774 \uc0b0\uc744 PR \uc804\uccb4\uc801\uc73c\ub85c \ud655\uc0b0\uc2dc\ucf1c \ud328\ud134\uc744 \uc548\uc815\ud654\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc774\ub54c\ub294 \uc628\ub3c4\ub97c \uc815\ud655\ud788 \uc870\uc808\ud574\uc57c \ud574\uc11c \uc628\ub3c4\ub97c \ubc14\uafd4\uac00\uba74\uc11c \ud328\ud134 \ubaa8\uc591\uc744 \uc77c\uc77c\uc774 \ud655\uc778\ud588\ub294\ub370 120\ub3c4 2\ubd84\uc774 \uac00\uc7a5 \ud328\ud134\uc774 \uc798 \ub098\uc640\uc11c PEB, Soft Bake 120\ub3c4 2\ubd84 Baking\uc73c\ub85c \ub808\uc2dc\ud53c\ub97c \uc124\uc815\ud588\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\ud604\uc0c1 (Develop)<\/h3>\n\n\n\n<p>\uc9c0\uae08\uae4c\uc9c0\ub294 \uc6e8\uc774\ud37c \uc804\uccb4\uc801\uc73c\ub85c PR\uc774 \ucf54\ud305\ub41c \uc0c1\ud0dc\uc785\ub2c8\ub2e4. Mask\ub97c \uc0ac\uc6a9\ud574 \ub178\uad11\ud588\uc73c\ub2c8 PR\uc5d0 \ube5b\uc774 \ube44\ucdec \ubd80\ubd84\uacfc \ube44\ucde8\uc9c0 \uc54a\uc740 \ubd80\ubd84\uc774 \uc788\uc744 \ud150\ub370\uc694, Developer\ub77c\ub294 \uc6a9\uc561\uc744 \ud1b5\ud574 \ud328\ud130\ub2dd\uc744 \ud558\uac8c \ub429\ub2c8\ub2e4. \uc774\ub54c \ube5b\uc774 \ube44\ucdec \ubd80\ubd84\uc774 \ub0a0\uc544\uac00\ub294\uc9c0 \uc548 \ube44\ucdec \ubd80\ubd84\uc774 \ub0a0\uc544\uac00\ub294\uc9c0\uc5d0 \ub530\ub77c PR \uc885\ub958\uac00 \ub2ec\ub77c\uc9d1\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\ud604\uc0c1\uc774 \ub05d\ub098\uba74 \uc6e8\uc774\ud37c \uc704\uc5d0\ub294 \uc0ac\uc6a9\uc790\uac00 \uc6d0\ud558\ub294 \ud328\ud134\uc774 \ub9cc\ub4e4\uc5b4\uc9c0\uac8c \ub418\uace0 DI(Deionized water)\ub85c \uc53b\uace0 \ub9d0\ub9ac\uba74 \ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Hard Bake<\/h3>\n\n\n\n<p>\uc774\uc81c \ud3ec\ud1a0 \uacf5\uc815\uc758 \ub9c8\uc9c0\ub9c9 \ub2e8\uacc4\uc785\ub2c8\ub2e4. Hard Bake\ub294 110~130\ub3c4\uc5d0\uc11c \uc9c4\ud589\ud558\ub294\ub370\uc694, PR\uc758 \uc794\uc5ec Solvent\uc640 \uc218\ubd84\uc744 \ub0a0\ub824 PR\uc758 \uacbd\ub3c4\ub97c \uac15\ud654\ud558\uace0 \uae30\ud310\uacfc PR\uc758 \uc811\ucc29\ub825\uc744 \ub192\uc785\ub2c8\ub2e4. (\uc800\ub294 120\ub3c4\uc5d0\uc11c 5\ubd84 \ub808\uc2dc\ud53c\ub97c \uc0ac\uc6a9\ud588\uc2b5\ub2c8\ub2e4.)<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Photoresist(PR)\uc758 \ud2b9\uc9d5\uacfc \uc885\ub958<\/h2>\n\n\n\n<p>Photoresist\ub294 \ube5b\uc5d0 \uc758\ud574\uc11c \ud654\ud559\uad6c\uc870\uac00 \ubc14\ub00c\ub294\ub370 \uadf8\ub85c \uc778\ud574\uc11c \ud6c4\uc18d \ucc98\ub9ac\uc778 Develop \uacfc\uc815\uc5d0\uc11c \ube5b\uc744 \ubc1b\uac70\ub098 \ubc1b\uc9c0 \uc54a\uc740 \ubd80\ubd84\uc774 \ub179\ub294 \ud2b9\uc131\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ud2b9\uc131\uc744 \uc774\uc6a9\ud574\uc11c \uc6e8\uc774\ud37c \uc704\uc5d0 \uc120\ud0dd\uc801\uc73c\ub85c \uc99d\ucc29\uc774\ub098 Etching \ub4f1\uc744 \ud560 \uc218 \uc788\ub294 \uac74\ub370\uc694, PR\uc740 \ud06c\uac8c 2\uac00\uc9c0 \uc885\ub958\uac00 \uc788\uc2b5\ub2c8\ub2e4. \ube5b\uc744 \ucb14 \ubd80\ubd84\uc774 \ub179\uc73c\uba74 Positive PR, \ube5b\uc744 \ucb10\uc9c0 \uc54a\uc740 \ubd80\ubd84\uc774 \ub179\uc73c\uba74 Negative PR\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Positive PR<\/h3>\n\n\n\n<p>Positive PR\uc740 Negative PR\uc5d0 \ube44\ud574 Resolution\uc774 \ub6f0\uc5b4\ub098\ub2e4\ub294 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ub610\ud55c Baking \uc2dc\uc5d0 \uc628\ub3c4\ub098 Baking time \uc124\uc815\uc744 \uc798\ubabb\ud558\uba74 Develop \uacfc\uc815\uc5d0\uc11c \uc794\uc5ec PR\uc778 Scum\uc774 \uc0dd\uc131\ub418\ub294\ub370\uc694, Positive PR\uc758 \uacbd\uc6b0 \uc774 Scum\uc774 \uc798 \ub9cc\ub4e4\uc5b4\uc9c0\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. Step coverage, \ub6f0\uc5b4\ub09c \uc5f4\uc801 \uc548\uc815\ub3c4\ub85c \uc778\ud574 \ud604\ub300 \ubbf8\uc138\ud328\ud130\ub2dd\uc5d0\uc11c \uc8fc\ub85c \uc0ac\uc6a9\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\ub2e4\ub9cc \uc0b0\ud654\ub9c9\uacfc \uc811\ucc29\uc131\uc774 \uc88b\uc9c0 \uc54a\uace0 Negative PR \ub300\ube44 \ube44\uc6a9\uc774 \ube44\uc2f8\ub2e4\ub294 \ub2e8\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Negative PR<\/h3>\n\n\n\n<p>Negative PR\uc740 Positive PR\uacfc \ubc18\ub300\ub77c\uace0 \uc0dd\uac01\ud558\uc2dc\uba74 \ub429\ub2c8\ub2e4. \uc0b0\ud654\ub9c9\uacfc \uc811\ucc29\uc131\uc774 \uc801\uace0 \ube44\uc6a9\ub3c4 \uc0c1\ub300\uc801\uc73c\ub85c \uc800\ub834\ud558\uc9c0\ub9cc, Resolution\uc774 \uc88b\uc9c0 \uc54a\ub2e4\ub294 \ub2e8\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ub610\ud55c Develop \ub2e8\uacc4\uc5d0\uc11c PR\uc774 \ubd80\ud480\uc5b4 \uc624\ub974\ub294 Swelling \ud604\uc0c1\uc774 \uc77c\uc5b4\ub0a0 \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<figure class=\"wp-block-table is-style-stripes\"><table class=\"has-fixed-layout\"><thead><tr><th class=\"has-text-align-center\" data-align=\"center\">Positive PR<\/th><th class=\"has-text-align-center\" data-align=\"center\">Negative PR<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">\uc790\uc678\uc120\uc5d0 \ub178\ucd9c\ub41c \ubd80\ubd84\uc774 \uc81c\uac70<br><br>Scum x, Steop coverage \uc88b\uc74c<br>Resolution \uc88b\uc74c<br><br>\uc0b0\ud654\ub9c9\uacfc \uc811\ucc29\uc131 \ub5a8\uc5b4\uc9d0<br><br>\ube44\uc308<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uc790\uc678\uc120\uc5d0 \ub178\ucd9c\ub418\uc9c0 \uc54a\uc740 \ubd80\ubd84\uc774 \uc81c\uac70<br><br>\ubbf8\uc138\ud328\ud130\ub2dd\uc5d0 \uc801\ud569\ud558\uc9c0 \uc54a\uc74c<br><br>\uc0b0\ud654\ub9c9\uacfc \uc811\ucc29\uc131 \uc88b\uc74c<br><br>\uc800\ub834<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\">\ube5b\uc744 \ubc1b\uc740 \ubd80\ubd84\uc758 \uc8fc\uc704<br>PR \uc131\ubd84 \uac04\uc758 \uacb0\ud569\uc774 \uc57d\ud574\uc838\uc11c<br>\uc717\ubd80\ubd84\uc774 \ub113\uc740 profile \ud615\uc131<\/td><td class=\"has-text-align-center\" data-align=\"center\">\ube5b\uc744 \ubc1b\uc740 \ubd80\ubd84 \uc8fc\uc704<br>PR \uc131\ubd84 \uac04\uc758 \uacb0\ud569\uc774 \uac15\ud574\uc838\uc11c<br>\uc717\ubd80\ubd84\uc774 \uc881\uc740 profile \ud615\uc131<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/bpyRL9\/btsmrXg2DuR\/s5J81nK3CGoP3Sk5HCStkk\/img.png\"><\/td><td class=\"has-text-align-center\" data-align=\"center\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/XrdoL\/btsmtcY6n5R\/TVarqLKy9KkfWuF38IMtu1\/img.png\"><\/td><\/tr><\/tbody><\/table><figcaption class=\"wp-element-caption\">Positive PR VS Negative PR<\/figcaption><\/figure>\n\n\n\n<p>PR \uc885\ub958\uc5d0 \ub530\ub77c \ub2e4\uc74c\uacfc \uac19\uc740 profile\uc758 \ucc28\uc774\uac00 \uc788\ub294\ub370\uc694, \uc800\ud76c\ub294 <a href=\"https:\/\/rtlearner.com\/photolithography-issue-post-expose-baking-lift-off\/\">Lift-off<\/a> \ubc29\uc2dd\uc73c\ub85c \uacf5\uc815\uc744 \ud574\uc11c Negative type\uc744 \uc0ac\uc6a9\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">UV Exposure<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\ub178\uad11 \ubc29\ubc95<\/h3>\n\n\n\n<p>\uc790\uc678\uc120\uc744 \uc0ac\uc6a9\ud558\ub294 \uae30\ubcf8\uc801\uc778 \ub178\uad11 \uacf5\uc815 \uc7a5\ube44\uc5d0\ub294 \ud06c\uac8c \uc138 \uac00\uc9c0 \ub178\uad11 \ubc29\ubc95\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Contact aligner<\/li>\n\n\n\n<li>Proximity aligner<\/li>\n\n\n\n<li>Projection aligner<\/li>\n<\/ul>\n\n\n\n<figure class=\"wp-block-table is-style-regular\"><table class=\"has-fixed-layout\"><thead><tr><th>Contact aligner<\/th><th>Proximity aligner<\/th><th>Projection aligner<\/th><\/tr><\/thead><tbody><tr><td><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/bYP3np\/btsIUSxu2Kv\/iuura3OIw1ou7bIFnT3X71\/img.png\"><\/td><td><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/b566Cg\/btsIUx8a8YI\/lieI9CCFwVnHrdXuIsX3y1\/img.png\"><\/td><td><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/b5oYjF\/btsIUK0AuCf\/DVyUFNfgj8btHDnBoFjH1K\/img.png\"><\/td><\/tr><\/tbody><\/table><figcaption class=\"wp-element-caption\">\ub178\uad11 \ubc29\uc2dd \ube44\uad50<\/figcaption><\/figure>\n\n\n\n<p>\ucd08\ucc3d\uae30\uc5d0 \uc0ac\uc6a9\ud588\ub358 \ub178\uad11 \ubc29\ubc95\uc778 Contact aligner\uc640 Proximity aligner\ub294 \ub9c8\uc2a4\ud06c\uc640 wafer \uc0ac\uc774\uc758 \uac04\uaca9\uc5d0 \uc758\ud574 \uad6c\ubd84\ub429\ub2c8\ub2e4. Contact aligner \ubc29\uc2dd\uc758 \uacbd\uc6b0, \ub9c8\uc2a4\ud06c\uc640 wafer\uac00 \uac00\uae4c\uc774 \ubd99\uc5b4\uc788\uc5b4 \ube5b\uc758 \ud68c\uc808\uc5d0 \uc601\ud5a5\uc744 \uc798 \ubc1b\uc9c0 \uc54a\ub294\ub2e4\ub294 \uc7a5\uc810\uc774 \uc788\uc9c0\ub9cc \ub9c8\uc2a4\ud06c\uac00 PR\uc5d0 \uc624\uc5fc\ub429\ub2c8\ub2e4. \uadf8\ub798\uc11c \ub9c8\uc2a4\ud06c\uc758 \uc218\uba85\uc774 \ub2e8\ucd95\ub41c\ub2e4\ub294 \ub2e8\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc774\ub7ec\ud55c \ubc29\ubc95\uc740 \uc5f0\uad6c\uc2e4\uc5d0\uc11c\ub9cc \uc0ac\uc6a9\ud558\ub294\ub370\uc694, \uc800\ud76c \uc5f0\uad6c\uc2e4\uc5d0\uc11c\ub3c4 Contact aligner \ubc29\uc2dd\uc73c\ub85c \ub178\uad11\ud588\uc2b5\ub2c8\ub2e4. \uadf8\ub798\uc11c \ub9e4\ubc88 \ub9c8\uc2a4\ud06c\ub97c \uc544\uc138\ud1a4\uc774\ub098 \uc5d0\ud0c4\uc62c\ub85c \uc138\ucc99\ud574\uc57c\ub9cc \ud588\uc5b4\uc694,,,,<\/p>\n\n\n\n<p>Proximity aligner\uc758 \uacbd\uc6b0 \ub9c8\uc2a4\ud06c\ub97c \ubcf4\ud638\ud560 \uc218 \uc788\uc9c0\ub9cc \ube5b\uc758 \ud68c\uc808 \ud604\uc0c1\uc73c\ub85c \uc815\ubc00\ud55c \ud328\ud130\ub2dd\uc774 \ubd88\uac00\ud569\ub2c8\ub2e4. \uc774 \ubb38\uc81c\ub97c \ud574\uacb0\ud558\uae30 \uc704\ud574 \ud604\uc7ac \ubc18\ub3c4\uccb4 \uc591\uc0b0 \uacf5\uc815\uc5d0\uc11c\ub294 \ub9c8\uc2a4\ud06c\uc640 wafer \uc0ac\uc774\uc5d0 \ub80c\uc988 \ub4f1\uc758 \uc801\uc808\ud55c \uad11\ud559\uacc4\ub97c \ubc30\uce58\ud558\uc5ec \ub9c8\uc2a4\ud06c\ub97c \ubcf4\ud638\ud558\uace0 \ud68c\uc808\ud6a8\uacfc\ub97c \ubc29\uc9c0\ud558\ub294 Projection aligner \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\ub178\uad11 \ud30c\uc7a5<\/h3>\n\n\n<style>.kb-image577_d216eb-c6.kb-image-is-ratio-size, .kb-image577_d216eb-c6 .kb-image-is-ratio-size{max-width:500px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_d216eb-c6.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_d216eb-c6 .kb-image-is-ratio-size{align-self:unset;}.kb-image577_d216eb-c6 figure{max-width:500px;}.kb-image577_d216eb-c6 .image-is-svg, .kb-image577_d216eb-c6 .image-is-svg img{width:100%;}.kb-image577_d216eb-c6 .kb-image-has-overlay:after{opacity:0.3;}.kb-image577_d216eb-c6 img.kb-img, .kb-image577_d216eb-c6 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image577_d216eb-c6.kb-image-is-ratio-size, .kb-image577_d216eb-c6 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image577_d216eb-c6 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image577_d216eb-c6\"><figure class=\"aligncenter\"><a href=\"https:\/\/www.kipost.net\/news\/articleView.html?idxno=3886\" class=\"kb-advanced-image-link\" target=\"_blank\" rel=\"noopener noreferrer\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/GZEof\/btsoINKslky\/ljJn622KMUclVKIoNdLxg0\/img.jpg\" alt=\"\ub178\uad11 \ud30c\uc7a5 \uc124\uba85\" class=\"kb-img\"\/><\/a><figcaption>\ub178\uad11 \ud30c\uc7a5 \uc124\uba85<\/figcaption><\/figure><\/div>\n\n\n\n<p>\ub178\uad11\uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ud558\ub294 \ube5b\uc740 \uc790\uc678\uc120\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \ucd08\uae30\uc5d0\ub294 \uc218\uc740\uc744 \uc774\uc6a9\ud558\uc5ec g-line(436nm)\uacfc i-line(365nm)\uc744 \uc0ac\uc6a9\ud588\uc9c0\ub9cc, \ub354 \uc815\ubc00\ud55c \ud328\ud130\ub2dd \uae30\uc220\uc774 \ud544\uc694\ud568\uc5d0 \ub530\ub77c \ud604\uc7ac\ub294 KrF eximer(248nm), ArF eximer(193nm)\ub97c \ud65c\uc6a9\ud558\uc5ec \ub354 \uc9e7\uc740 \ud30c\uc7a5\uc758 \uc790\uc678\uc120\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. 10nm \uc774\ud558\uc758 \ucd08\uc815\ubc00 \ud328\ud130\ub2dd\uc744 \ud558\ub294 \ud30c\uc6b4\ub4dc\ub9ac\uc758 \uacbd\uc6b0 EUV(Extreme UltraViolet, 13.5nm)\ub97c \uc0ac\uc6a9\ud558\uae30\ub3c4 \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc800\ud76c \uc5f0\uad6c\uc2e4\uc5d0\uc11c\ub294 i-line(365nm)\uc744 \uc0ac\uc6a9\ud558\uc5ec \ud328\ud130\ub2dd\uc744 \ud588\uace0 \uc7a5\ube44 \uc2a4\ud399\uc0c1 1\u339b\uae4c\uc9c0 \ud328\ud130\ub2dd\uc774 \uac00\ub2a5\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">Resolution<\/h4>\n\n\n\n<p>\ud3ec\ud1a0 \uacf5\uc815\uc5d0\uc11c \uac00\uc7a5 \uc911\uc694\ud55c \uac83\uc740 \ubd84\ud574\ub2a5(resolution)\uc774\ub77c\uace0 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. Resoltion\uc740 \ud328\ud130\ub2dd \uc2dc \uad6c\ubd84\ud560 \uc218 \uc788\ub294 \ucd5c\uc18c \ud328\ud134 \ud06c\uae30\ub77c\uace0 \ud560 \uc218 \uc788\ub294\ub370\uc694, \uc774\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uc218\uc2dd\uc73c\ub85c \ud45c\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image577_ea8f3e-c8.kb-image-is-ratio-size, .kb-image577_ea8f3e-c8 .kb-image-is-ratio-size{max-width:400px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_ea8f3e-c8.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_ea8f3e-c8 .kb-image-is-ratio-size{align-self:unset;}.kb-image577_ea8f3e-c8 figure{max-width:400px;}.kb-image577_ea8f3e-c8 .image-is-svg, .kb-image577_ea8f3e-c8 .image-is-svg img{width:100%;}.kb-image577_ea8f3e-c8 .kb-image-has-overlay:after{opacity:0.3;}.kb-image577_ea8f3e-c8 img.kb-img, .kb-image577_ea8f3e-c8 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image577_ea8f3e-c8.kb-image-is-ratio-size, .kb-image577_ea8f3e-c8 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image577_ea8f3e-c8 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image577_ea8f3e-c8\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/HxGJ8\/btsoSmyWGgw\/2yikkjEpK4yudUw1cA4p8k\/img.png\" alt=\"Resolution \uc218\uc2dd\" class=\"kb-img\"\/><figcaption>Resolution \uc218\uc2dd<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uacf5\uc815 \uacc4\uc218\ub294 PR\uc758 \ud2b9\uc131 \uac1c\uc120, \uacf5\uc815 \ucd5c\uc801\ud654, \ub9c8\uc2a4\ud06c \ud328\ud134 \uac1c\uc120(OPC \ub4f1)\uc744 \ud1b5\ud574 \ub192\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc218\uc2dd\uc5d0\uc11c \uc54c \uc218 \uc788\ub4ef\uc774 \uc790\uc678\uc120 \ud30c\uc7a5\uc774 \uc9e7\uc544\uc9c8\uc218\ub85d Res \uac12\uc774 \uc791\uc544\uc9c0\uace0, \uc774\ub294 \ub354 \uc791\uc740 \ud328\ud134\ub3c4 \uad6c\ubd84\ud560 \uc218 \uc788\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4. (\uc815\ubc00\ub3c4 \ud5a5\uc0c1)<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">Depth of Focus (DOF)<\/h4>\n\n\n\n<p>\uad11\ud559\uacc4(\ub80c\uc988)\ub97c \uc0ac\uc6a9\ud558\uba74 \uc218\uc9c1 \ubc29\ud5a5\uc73c\ub85c \uc624\ucc28\uac00 \ubc1c\uc0dd\ud558\ub294\ub370, \uc774\ub97c DOF(Depth of Focus)\ub77c\uace0 \ud569\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image577_5d55c1-25.kb-image-is-ratio-size, .kb-image577_5d55c1-25 .kb-image-is-ratio-size{max-width:400px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_5d55c1-25.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image577_5d55c1-25 .kb-image-is-ratio-size{align-self:unset;}.kb-image577_5d55c1-25 figure{max-width:400px;}.kb-image577_5d55c1-25 .image-is-svg, .kb-image577_5d55c1-25 .image-is-svg img{width:100%;}.kb-image577_5d55c1-25 .kb-image-has-overlay:after{opacity:0.3;}.kb-image577_5d55c1-25 img.kb-img, .kb-image577_5d55c1-25 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image577_5d55c1-25.kb-image-is-ratio-size, .kb-image577_5d55c1-25 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image577_5d55c1-25 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image577_5d55c1-25\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/ZteOz\/btsoRfAk5Lr\/ccFmVaapQUnz5K3yv1K7p1\/img.png\" alt=\"DOF \uc218\uc2dd\" class=\"kb-img\"\/><figcaption>DOF \uc218\uc2dd<\/figcaption><\/figure><\/div>\n\n\n\n<p>NA(numerical aperture)\uac00 \ud074\uc218\ub85d(\ud070 \ub80c\uc988), \uc9e7\uc740 \ud30c\uc7a5\uc744 \uc0ac\uc6a9\ud560\uc218\ub85d DOF\uac00 \uc791\uc544\uc9c0\uace0, \uc774\ub294 PR\uc758 \ub450\uaed8\ub098 \uae30\ud310 \ub192\uc774, \ud3c9\ud0c4\ub3c4\uc5d0 \ubbfc\uac10\ud574\uc9c4\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc815\ub9ac\ud558\uc790\uba74 NA\uac00 \ud070 \ub80c\uc988\uc640 \uc9e7\uc740 \ud30c\uc7a5\uc758 \uc790\uc678\uc120\uc73c\ub85c \ub178\uad11\ud558\uba74 \ud574\uc0c1\ub3c4\ub294 \ub192\uc77c \uc218 \uc788\uc9c0\ub9cc DOF\ub3c4 \uc791\uc544\uc838 \uc218\uc9c1 \uc624\ucc28\uc5d0 \ubbfc\uac10\ud574\uc9d1\ub2c8\ub2e4. \uc774\ub97c \ud574\uacb0\ud558\uae30 \uc704\ud574 CMP\uacf5\uc815\uc744 \ud1b5\ud574 \uae30\ud310\uc744 \ud3c9\ud0c4\ud654\ud558\uac70\ub098 PR\uc758 \ub450\uaed8\ub97c \uc904\uc774\ub294 \uc791\uc5c5\uc744 \ud569\ub2c8\ub2e4.<\/p>\n\n\n<style>.kadence-column577_bd4666-fd > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column577_bd4666-fd > .kt-inside-inner-col,.kadence-column577_bd4666-fd > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column577_bd4666-fd > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column577_bd4666-fd > .kt-inside-inner-col{flex-direction:column;}.kadence-column577_bd4666-fd > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column577_bd4666-fd > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column577_bd4666-fd{position:relative;}@media all and (max-width: 1024px){.kadence-column577_bd4666-fd > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column577_bd4666-fd > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column577_bd4666-fd\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-oxidation\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc0b0\ud654 \uacf5\uc815 (Oxidation)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-etching\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc2dd\uac01 \uacf5\uc815 (Etching)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-deposition\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc99d\ucc29 \uacf5\uc815 (Deposition)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-doping\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ub3c4\ud551 \uacf5\uc815 (Doping)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-cleaning\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc138\uc815 \uacf5\uc815 (Cleaning)<\/a><\/p>\n<\/div><\/div>\n\n\n\n<p>\ucc38\uace0:&nbsp;<a href=\"https:\/\/semiconductor.samsung.com\/kr\/support\/tools-resources\/fabrication-process\/eight-essential-semiconductor-fabrication-processes-part-4-photolithography-laying-the-blueprint\/\" target=\"_blank\" rel=\"noreferrer noopener\">\uc0bc\uc131\uc804\uc790 [\ubc18\ub3c4\uccb4 \ubc31\uacfc\uc0ac\uc804]<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>This time, we'll take a closer look at photolithography. First, let's take a look at the overall process sequence...<\/p>","protected":false},"author":1,"featured_media":578,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[3],"tags":[28,42],"class_list":["post-577","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-semiconductor-process-and-device","tag-semiconductor","tag-42"],"_links":{"self":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/577","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/comments?post=577"}],"version-history":[{"count":13,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/577\/revisions"}],"predecessor-version":[{"id":763,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/577\/revisions\/763"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media\/578"}],"wp:attachment":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media?parent=577"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/categories?post=577"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/tags?post=577"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}<!-- This website is optimized by Airlift. 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