{"id":574,"date":"2024-08-01T18:04:58","date_gmt":"2024-08-01T09:04:58","guid":{"rendered":"https:\/\/rtlearner.com\/?p=574"},"modified":"2025-11-13T11:12:29","modified_gmt":"2025-11-13T02:12:29","slug":"semiconductor-process-oxidation","status":"publish","type":"post","link":"https:\/\/rtlearner.com\/en\/semiconductor-process-oxidation\/","title":{"rendered":"[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc0b0\ud654 \uacf5\uc815 (Oxidation)"},"content":{"rendered":"\n<p>\uc0b0\ud654 \uacf5\uc815(oxidation)\uc740 \uc6e8\uc774\ud37c(wafer) \uc704\uc5d0 \uc0b0\ud654\ub9c9(oxide)\uc744 \uc0dd\uc131\ud558\uae30 \uc704\ud574 \uc9c4\ud589\ud558\ub294 \uacf5\uc815\uc785\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-table-of-content-nav.kb-table-of-content-id574_15ce2f-19 .kb-table-of-content-wrap{padding-top:var(--global-kb-spacing-sm, 1.5rem);padding-right:var(--global-kb-spacing-sm, 1.5rem);padding-bottom:var(--global-kb-spacing-sm, 1.5rem);padding-left:var(--global-kb-spacing-sm, 1.5rem);box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kb-table-of-content-nav.kb-table-of-content-id574_15ce2f-19 .kb-table-of-contents-title-wrap{padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.kb-table-of-content-nav.kb-table-of-content-id574_15ce2f-19 .kb-table-of-contents-title{font-weight:regular;font-style:normal;}.kb-table-of-content-nav.kb-table-of-content-id574_15ce2f-19 .kb-table-of-content-wrap .kb-table-of-content-list{font-weight:regular;font-style:normal;margin-top:var(--global-kb-spacing-sm, 1.5rem);margin-right:0px;margin-bottom:0px;margin-left:0px;}@media all and (max-width: 767px){.kb-table-of-content-nav.kb-table-of-content-id574_15ce2f-19 .kb-table-of-contents-title{font-size:var(--global-kb-font-size-md, 1.25rem);}.kb-table-of-content-nav.kb-table-of-content-id574_15ce2f-19 .kb-table-of-content-wrap .kb-table-of-content-list{font-size:var(--global-kb-font-size-sm, 0.9rem);}}<\/style>\n\n<style>.kadence-column574_699207-fd > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column574_699207-fd > .kt-inside-inner-col,.kadence-column574_699207-fd > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column574_699207-fd > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column574_699207-fd > .kt-inside-inner-col{flex-direction:column;}.kadence-column574_699207-fd > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column574_699207-fd > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column574_699207-fd{position:relative;}@media all and (max-width: 1024px){.kadence-column574_699207-fd > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column574_699207-fd > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column574_699207-fd\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-photolithography\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-etching\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc2dd\uac01 \uacf5\uc815 (Etching)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-deposition\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc99d\ucc29 \uacf5\uc815 (Deposition)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-doping\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ub3c4\ud551 \uacf5\uc815 (Doping)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-cleaning\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc138\uc815 \uacf5\uc815 (Cleaning)<\/a><\/p>\n<\/div><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\uc0b0\ud654(Oxidation)\uc758 \ud2b9\uc9d5\uacfc \uc5ed\ud560<\/h2>\n\n\n\n<p>\uba3c\uc800 oxide\uc758 \ud2b9\uc9d5\uc5d0 \ub300\ud574 \uc54c\uc544\ubcfc\uae4c\uc694?? \uc5ec\uae30\uc11c \ub9d0\ud558\ub294 oxide\ub294 SiO<sub>2<\/sub>\uc785\ub2c8\ub2e4. \uc6b0\uc120 \uc6e8\uc774\ud37c\uc758 \uc6d0\ub8cc\uac00 Si\uc774\uae30 \ub54c\ubb38\uc5d0&nbsp;<strong>\uc27d\uac8c \ud615\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4<\/strong>. \ub610\ud55c \uc808\uc5f0\uc131\uacfc Si\uacfc\uc758 \uacc4\uba74 \ud2b9\uc131\uc774 \uad49\uc7a5\ud788 \uc88b\uc544\uc11c&nbsp;<strong>MOS \uc18c\uc790\uc5d0\uc11c Gate oxide<\/strong>\ub85c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub610\ud55c, \ub3c4\ud551 \uac19\uc740 \ud655\uc0b0 \uacf5\uc815\uc5d0\uc11c \ud544\uc694\ud55c \ubd80\ubd84\ub9cc \ub178\ucd9c\ud558\ub294<strong>&nbsp;\uc591\uc9c8\uc758 Mask \uc5ed\ud560<\/strong>\uc744&nbsp;\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p>Si\ub294 \uc0b0\ud654\ub97c \ud1b5\ud574 SiO<sub>2<\/sub>\ub85c \ub9cc\ub4e4\uba74 \ubd80\ud53c\uac00 \ub298\uc5b4\ub0a9\ub2c8\ub2e4. \uce58\ud658 \ube44\ub294 Si:SiO<sub>2<\/sub> = 0.46:1\ub85c \uac70\uc758 2\ubc30\uac00 \ub41c\ub2e4\uace0 \ubcf4\uc2dc\uba74 \ub429\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image574_a63e53-ed.kb-image-is-ratio-size, .kb-image574_a63e53-ed .kb-image-is-ratio-size{max-width:400px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image574_a63e53-ed.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image574_a63e53-ed .kb-image-is-ratio-size{align-self:unset;}.kb-image574_a63e53-ed figure{max-width:400px;}.kb-image574_a63e53-ed .image-is-svg, .kb-image574_a63e53-ed .image-is-svg img{width:100%;}.kb-image574_a63e53-ed .kb-image-has-overlay:after{opacity:0.3;}.kb-image574_a63e53-ed img.kb-img, .kb-image574_a63e53-ed .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image574_a63e53-ed.kb-image-is-ratio-size, .kb-image574_a63e53-ed .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image574_a63e53-ed figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image574_a63e53-ed\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/cDxtzp\/btsk9DkA25h\/2MxwM1Z5lvjKhIRajbru3K\/img.png\" alt=\"Si \uc704\uc758 oxide\" class=\"kb-img\"\/><figcaption>Si \uc704\uc758 oxide<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc0b0\ud654 \uacfc\uc815\uc5d0\uc11c Si \ud45c\uba74\uc5d0 \uc788\ub358 \ubd88\uc21c\ubb3c\uc774\ub098 \uacb0\ud568\uc774 \uc0b0\ud654\ub9c9 \ub0b4\ubd80\uc5d0 \ud3ec\ud568\ub418\uae30 \ub54c\ubb38\uc5d0 Si\uc758 \uc9c8\uc774\ub098 \uc0b0\ud654\ub9c9\uacfc\uc758 \uacbd\uacc4\uba74\uc774 \uc548\uc815\ud574\uc9c4\ub2e4\ub294 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image574_43fa0c-30.kb-image-is-ratio-size, .kb-image574_43fa0c-30 .kb-image-is-ratio-size{max-width:400px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image574_43fa0c-30.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image574_43fa0c-30 .kb-image-is-ratio-size{align-self:unset;}.kb-image574_43fa0c-30 figure{max-width:400px;}.kb-image574_43fa0c-30 .image-is-svg, .kb-image574_43fa0c-30 .image-is-svg img{width:100%;}.kb-image574_43fa0c-30 .kb-image-has-overlay:after{opacity:0.3;}.kb-image574_43fa0c-30 img.kb-img, .kb-image574_43fa0c-30 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image574_43fa0c-30.kb-image-is-ratio-size, .kb-image574_43fa0c-30 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image574_43fa0c-30 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image574_43fa0c-30\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/b93BzC\/btslmVp6pbC\/F9gKbFyZZkjrk0iWcR58UK\/img.jpg\" alt=\"\uace0\ub9bd \uacf5\uc815\" class=\"kb-img\"\/><figcaption>\uace0\ub9bd \uacf5\uc815<\/figcaption><\/figure><\/div>\n\n\n\n<p>&nbsp;Si\uac00 \uc0b0\ud654 \uc2dc \ubd80\ud53c\uac00 \ub298\uc5b4\ub09c\ub2e4\ub294 \ud2b9\uc9d5\uc740 \uc8fc\ubcc0\uacfc \uac04\uc12d\uc744 \ub9c9\uae30 \uc704\ud55c&nbsp;<strong>\uace0\ub9bd \uacf5\uc815(Isolation)<\/strong>\uc5d0\ub3c4 \uc4f0\uc600\uc2b5\ub2c8\ub2e4. Si\uac00 \ub178\ucd9c\ub41c \ubd80\ubd84\ub9cc SiO<sub>2<\/sub>\uac00 \ub450\uaebc\uc6cc\uc9c0\ub294\ub370\uc694, \uc774\ub97c LOCOS(Local Oxidation of Silicon) \uacf5\uc815\uc774\ub77c\uace0 \ud569\ub2c8\ub2e4. \uc774\ub7ec\uba74 \uacbd\uc0ac\uac00 \uc644\ub9cc\ud55c \ubd80\ubd84\uc774 \uc0dd\uaca8\uc11c \uc774\ud6c4\uc5d0 \uc788\ub294 \uacf5\uc815\uc774 \uc26c\uc6cc\uc9c0\ub294 \uc7a5\uc810\uc774 \uc788\ub294\ub370\uc694, \uc694\uc998\uc5d0\ub294 \uacf5\uc815\uc774 \uc810\uc810 \ubbf8\uc138\ud654\ub418\uc5b4\uc11c LOCOS \uacf5\uc815 \ub300\uc2e0 STI(Shallow Trench Isoation) \uacf5\uc815\uc744 \uc0ac\uc6a9\ud55c\ub2e4\uace0 \ud569\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-image574_a1c57f-16.kb-image-is-ratio-size, .kb-image574_a1c57f-16 .kb-image-is-ratio-size{max-width:300px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image574_a1c57f-16.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image574_a1c57f-16 .kb-image-is-ratio-size{align-self:unset;}.kb-image574_a1c57f-16 figure{max-width:300px;}.kb-image574_a1c57f-16 .image-is-svg, .kb-image574_a1c57f-16 .image-is-svg img{width:100%;}.kb-image574_a1c57f-16 .kb-image-has-overlay:after{opacity:0.3;}.kb-image574_a1c57f-16 img.kb-img, .kb-image574_a1c57f-16 .kb-img img{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}@media all and (max-width: 767px){.kb-image574_a1c57f-16.kb-image-is-ratio-size, .kb-image574_a1c57f-16 .kb-image-is-ratio-size{max-width:250px;width:100%;}.kb-image574_a1c57f-16 figure{max-width:250px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image574_a1c57f-16\"><figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/blog.kakaocdn.net\/dn\/c5HfTv\/btslgisDdeH\/h4jyX4F0YBy8dFgnrMvo50\/img.png\" alt=\"STI(Shallow Trench Isoation) \uacf5\uc815\" class=\"kb-img\"\/><figcaption>STI(Shallow Trench Isoation) \uacf5\uc815<\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc0b0\ud654\uc758 \ubd80\ud53c\ud33d\ucc3d\uc744 \uc774\uc6a9\ud558\ub294 \uac83\uc774 \uc544\ub2c8\ub77c, Nitride(\uc9c8\ud654\ubb3c)\ub97c \uc0ac\uc6a9\ud574 \uc120\ud0dd\uc801\uc778 \uc2dd\uac01\uacf5\uc815\uc73c\ub85c Trench\ub97c \ub9cc\ub4e4\uace0 \uadf8 \uacf5\uac04\uc5d0 \ubd80\ub3c4\uccb4\uc778 oxide\ub85c \ucc44\uc6b0\ub294 \uacf5\uc815\uc785\ub2c8\ub2e4.&nbsp;<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\uc0b0\ud654 \ubc29\ubc95<\/h2>\n\n\n\n<p>\uc0b0\ud654\uacf5\uc815 \ubc29\ubc95\uc5d0\ub294 \ud06c\uac8c \uac74\uc2dd\uc0b0\ud654(dry oxidation)\uc640 \uc2b5\uc2dd\uc0b0\ud654(wet oxidation)\uac00 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ub458\uc758 \ucc28\uc774\ub294 \ub9d0 \uadf8\ub300\ub85c&nbsp;<strong>\ubb3c<\/strong>\uc744 \uc0ac\uc6a9\ud558\ub290\ub0d0 \uc0ac\uc6a9\ud558\uc9c0 \uc54a\ub290\ub0d0 \ucc28\uc774\uc778\ub370, \uc774\ub85c \uc778\ud574&nbsp;<strong>\uc0b0\ud654\uc18d\ub3c4<\/strong>\uc640&nbsp;<strong>\uc0b0\ud654\ub9c9 \uc9c8<\/strong>\uc5d0 \ucc28\uc774\uac00 \uc0dd\uae41\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\uac74\uc2dd \uc0b0\ud654<\/h3>\n\n\n\n<p>Si\ub294 \uacf5\uae30 \uc911\uc5d0 \ub194\ub46c\ub3c4 1~2nm \uc815\ub3c4\uc758 native oxide\uac00 \uc0dd\uc131\ub429\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0\ub294 \uc774\ubcf4\ub2e4 \ub450\uaecd\uace0 \uc9c8\uc774 \uc88b\uc740 oxide\uac00 \uc788\uc5b4\uc57c \ud558\ub294\ub370\uc694, \uadf8\ub798\uc11c \uace0\uc628(900~1200\ub3c4)\uc758 \uc0b0\uc18c \ubd84\uc704\uae30\uc5d0\uc11c \uc0b0\ud654\ub97c \uc9c4\ud589\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"has-text-align-center\">Si(s) + O<sub>2<\/sub>(g)&nbsp;\u2192 SiO<sub>2<\/sub>(s)<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\uc2b5\uc2dd \uc0b0\ud654<\/h3>\n\n\n\n<p>\uc2b5\uc2dd \uc0b0\ud654\ub294 \uc218\uc99d\uae30\ub97c \uc0ac\uc6a9\ud574 \uc0b0\ud654\ub97c \uc9c4\ud589\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"has-text-align-center\">Si(s) + H<sub>2<\/sub>O(g)&nbsp;\u2192 SiO<sub>2<\/sub>(s) + 2H<sub>2<\/sub>(g)<\/p>\n\n\n\n<p>\uac74\uc2dd \uc0b0\ud654\uc640 \uc2b5\uc2dd \uc0b0\ud654 \ubaa8\ub450 \uc18c\uc2a4 \uc6d0\uc790\uac00 \uc0b0\ud654\ub9c9\uc744 \uc9c0\ub098 Si &#8211; SiO<sub>2<\/sub>&nbsp;\uacc4\uba74\uc5d0\uc11c Si\uc640 \ubc18\uc751\ud558\uc5ec \uc0b0\ud654\uac00 \uc9c4\ud589\ub429\ub2c8\ub2e4. \uadf8\ub7f0\ub370 SiO<sub>2<\/sub>\uc5d0\uc11c H<sub>2<\/sub>O\uac00 O<sub>2<\/sub>\ubcf4\ub2e4 \uc6a9\ud574\ub3c4\uac00 1,000\ubc30 \uc815\ub3c4 \ud06c\uae30 \ub54c\ubb38\uc5d0 H<sub>2<\/sub>O\uac00 Si \uacc4\uba74\uc5d0 \ube68\ub9ac \ub2e4\ub2e4\ub974\uac8c \ub429\ub2c8\ub2e4. \uc989,&nbsp;<strong>\uc2b5\uc2dd\uc0b0\ud654\uac00 \uac74\uc2dd\uc0b0\ud654\ubcf4\ub2e4 \uc0b0\ud654\uc18d\ub3c4\uac00 \uc6d4\ub4f1\ud788 \ube60\ub985\ub2c8\ub2e4<\/strong>. \ub2e4\ub9cc, \uc2b5\uc2dd\uc0b0\ud654\uac00 \uc18d\ub3c4\uac00 \ube60\ub974\uc9c0\ub9cc \ubc00\ub3c4\uac00 \ub0ae\uc544&nbsp;<strong>\ub9c9\uc758 \uc9c8\uc774 \ub5a8\uc5b4\uc9c4\ub2e4\ub294 \ub2e8\uc810<\/strong>\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kadence-column574_1da45b-c8 > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column574_1da45b-c8 > .kt-inside-inner-col,.kadence-column574_1da45b-c8 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column574_1da45b-c8 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column574_1da45b-c8 > .kt-inside-inner-col{flex-direction:column;}.kadence-column574_1da45b-c8 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column574_1da45b-c8 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column574_1da45b-c8{position:relative;}@media all and (max-width: 1024px){.kadence-column574_1da45b-c8 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column574_1da45b-c8 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column574_1da45b-c8\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-photolithography\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-etching\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc2dd\uac01 \uacf5\uc815 (Etching)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-deposition\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc99d\ucc29 \uacf5\uc815 (Deposition)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-doping\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ub3c4\ud551 \uacf5\uc815 (Doping)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-cleaning\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc138\uc815 \uacf5\uc815 (Cleaning)<\/a><\/p>\n<\/div><\/div>\n\n\n\n<p>\ucc38\uace0: <a href=\"https:\/\/semiconductor.samsung.com\/kr\/support\/tools-resources\/fabrication-process\/eight-essential-semiconductor-fabrication-processes-part-2-oxidation-to-protect-the-wafer\/\" target=\"_blank\" rel=\"noopener\">\uc0bc\uc131\uc804\uc790 [\ubc18\ub3c4\uccb4 \ubc31\uacfc\uc0ac\uc804]<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Oxidation is a process that creates an oxide film on a wafer. Related\u2026<\/p>","protected":false},"author":1,"featured_media":575,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[3],"tags":[28,42],"class_list":["post-574","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-semiconductor-process-and-device","tag-semiconductor","tag-42"],"_links":{"self":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/574","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/comments?post=574"}],"version-history":[{"count":5,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/574\/revisions"}],"predecessor-version":[{"id":764,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/574\/revisions\/764"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media\/575"}],"wp:attachment":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media?parent=574"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/categories?post=574"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/tags?post=574"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}<!-- This website is optimized by Airlift. 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