{"id":1179,"date":"2026-01-26T10:03:22","date_gmt":"2026-01-26T01:03:22","guid":{"rendered":"https:\/\/rtlearner.com\/?p=1179"},"modified":"2026-01-26T10:03:23","modified_gmt":"2026-01-26T01:03:23","slug":"semiconductor-metrology-ellipsometry-alpha-step","status":"publish","type":"post","link":"https:\/\/rtlearner.com\/en\/semiconductor-metrology-ellipsometry-alpha-step\/","title":{"rendered":"[\ubc18\ub3c4\uccb4 \uacc4\uce21] \ubcf4\uc774\uc9c0 \uc54a\ub294 \ub9c9\uc758 \ub450\uaed8\ub97c \uc7ac\ub294 \ubc95: Ellipsometry\uc640 Alpha step"},"content":{"rendered":"\n<p>\ubc18\ub3c4\uccb4 \uce69\uc744 \ub9cc\ub4e4 \ub54c \uc6b0\ub9ac\ub294 &#8220;5nm\uc758 HfO<sub>2<\/sub>\ub97c \uc99d\ucc29\ud588\ub2e4&#8221;\uace0 \ub9d0\ud569\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \uadf8\uac8c \uc9c4\uc9dc 5nm\uc778\uc9c0 \uc5b4\ub5bb\uac8c \uc54c \uc218 \uc788\uc744\uae4c\uc694? \ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0\uc11c \ubc15\ub9c9(Thin Film)\uc758 \ub450\uaed8\uc640 \ubb3c\uc131\uc744 \uc815\ud655\ud788 \uce21\uc815\ud558\ub294 \uac83(Metrology)\uc740 \uacf5\uc815 \uc870\uac74\uc744 \uc7a1\ub294 \uac83\ub9cc\ud07c\uc774\ub098 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc774\ubc88 \uae00\uc5d0\uc11c\ub294 \ubc15\ub9c9\uc758 \ub450\uaed8\ub97c \uce21\uc815\ud558\ub294 \ubc29\ubc95 \uc911 \uc798 \uc54c\ub824\uc9c4 \uad11\ud559\uc801 \ubc29\ubc95(Ellipsometry)\uacfc \ubb3c\ub9ac\uc801 \ubc29\ubc95(Alpha Step)\uc758 \uc6d0\ub9ac\uc640, \uc2e4\ubb34\uc5d0\uc11c \ub370\uc774\ud130\ub97c \ud574\uc11d\ud558\ub294 \ub178\ud558\uc6b0\ub97c \uc815\ub9ac\ud574\ubcf4\uaca0\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kb-table-of-content-nav.kb-table-of-content-id1179_8a2c81-49 .kb-table-of-content-wrap{padding-top:var(--global-kb-spacing-sm, 1.5rem);padding-right:var(--global-kb-spacing-sm, 1.5rem);padding-bottom:var(--global-kb-spacing-sm, 1.5rem);padding-left:var(--global-kb-spacing-sm, 1.5rem);box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kb-table-of-content-nav.kb-table-of-content-id1179_8a2c81-49 .kb-table-of-contents-title-wrap{padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.kb-table-of-content-nav.kb-table-of-content-id1179_8a2c81-49 .kb-table-of-contents-title{font-weight:regular;font-style:normal;}.kb-table-of-content-nav.kb-table-of-content-id1179_8a2c81-49 .kb-table-of-content-wrap .kb-table-of-content-list{font-weight:regular;font-style:normal;margin-top:var(--global-kb-spacing-sm, 1.5rem);margin-right:0px;margin-bottom:0px;margin-left:0px;}@media all and (max-width: 767px){.kb-table-of-content-nav.kb-table-of-content-id1179_8a2c81-49 .kb-table-of-contents-title{font-size:var(--global-kb-font-size-md, 1.25rem);}.kb-table-of-content-nav.kb-table-of-content-id1179_8a2c81-49 .kb-table-of-content-wrap .kb-table-of-content-list{font-size:var(--global-kb-font-size-sm, 0.9rem);}}<\/style>\n\n<style>.kadence-column1179_9acd7c-f7 > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column1179_9acd7c-f7 > .kt-inside-inner-col,.kadence-column1179_9acd7c-f7 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column1179_9acd7c-f7 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column1179_9acd7c-f7 > .kt-inside-inner-col{flex-direction:column;}.kadence-column1179_9acd7c-f7 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column1179_9acd7c-f7 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column1179_9acd7c-f7{position:relative;}@media all and (max-width: 1024px){.kadence-column1179_9acd7c-f7 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column1179_9acd7c-f7 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column1179_9acd7c-f7\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-oxidation\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc0b0\ud654 \uacf5\uc815 (Oxidation)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-photolithography\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-etching\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc2dd\uac01 \uacf5\uc815 (Etching)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-deposition\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc99d\ucc29 \uacf5\uc815 (Deposition)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-doping\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ub3c4\ud551 \uacf5\uc815 (Doping)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-cleaning\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc138\uc815 \uacf5\uc815 (Cleaning)<\/a><\/p>\n<\/div><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">1. \ube5b\uc758 \ud3b8\uad11 \uc774\uc6a9: \uc5d8\ub9bd\uc18c\uba54\ud2b8\ub9ac (Ellipsometry)<\/h2>\n\n\n\n<p>\uc5d8\ub9bd\uc18c\uba54\ud2b8\ub9ac(Ellipsometry)\ub294 \ube5b\uc744 \uc774\uc6a9\ud558\uc5ec \ubc15\ub9c9\uc758 \ub450\uaed8(Thickness)\uc640 \uad74\uc808\ub960(Refractive Index, n), \uc18c\uad11\uacc4\uc218(k)\ub97c \ub3d9\uc2dc\uc5d0 \uce21\uc815\ud558\ub294 \uac00\uc7a5 \uac15\ub825\ud558\uace0 \uc815\ubc00\ud55c \uc7a5\ube44\uc785\ub2c8\ub2e4. Sub nm \ub2e8\uc704\uc758 \ucd08\ubc15\ub9c9\ub3c4 \uce21\uc815\ud560 \uc218 \uc788\uc5b4 \ubc18\ub3c4\uccb4 \uc591\uc0b0 \ub77c\uc778\uc758 \ud45c\uc900 \uc7a5\ube44\ub85c \uc4f0\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc8fc\uc758\uc0ac\ud56d\uc740, <strong>\ubc15\ub9c9 \ud45c\uba74\uc5d0\uc11c \ubc18\uc0ac\ub41c \ube5b<\/strong>\uacfc <strong>\ubc15\ub9c9\uc744 \ud22c\uacfc\ud558\uace0 \uae30\ud310\uc5d0\uc11c \ubc18\uc0ac\ub41c \ube5b<\/strong>\uc758 \ucc28\uc774\ub97c \ube44\uad50\ud558\ub294 \uac83\uc774\uae30 \ub54c\ubb38\uc5d0 \ube5b\uc774 \ud22c\uacfc\ub418\uc9c0 \uc54a\ub294 <strong>\uae08\uc18d\uc740 ellipsometry\ub85c \uacc4\uce21\ud558\uae30 \uc5b4\ub835\uc2b5\ub2c8\ub2e4<\/strong>.<\/p>\n\n\n<style>.kb-image1179_d658b7-a0.kb-image-is-ratio-size, .kb-image1179_d658b7-a0 .kb-image-is-ratio-size{max-width:290px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image1179_d658b7-a0.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image1179_d658b7-a0 .kb-image-is-ratio-size{align-self:unset;}.kb-image1179_d658b7-a0 figure{max-width:290px;}.kb-image1179_d658b7-a0 .image-is-svg, .kb-image1179_d658b7-a0 .image-is-svg img{width:100%;}.kb-image1179_d658b7-a0 .kb-image-has-overlay:after{opacity:0.3;}@media all and (max-width: 767px){.kb-image1179_d658b7-a0.kb-image-is-ratio-size, .kb-image1179_d658b7-a0 .kb-image-is-ratio-size{max-width:280px;width:100%;}.kb-image1179_d658b7-a0 figure{max-width:280px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image1179_d658b7-a0\"><figure class=\"aligncenter size-full\"><a href=\"https:\/\/www.filmetrics.kr\/ellipsometry\" class=\"kb-advanced-image-link\" target=\"_blank\" rel=\"noopener\"><img data-dominant-color=\"b37c7b\" data-has-transparency=\"false\" style=\"--dominant-color: #b37c7b;\" loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"248\" src=\"https:\/\/rtlearner.com\/wp-content\/uploads\/2025\/12\/image-10.jpg\" alt=\"\" class=\"kb-img wp-image-1181 not-transparent\"\/><\/a><\/figure><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">1.1. \uc791\ub3d9 \uc6d0\ub9ac: \ud3b8\uad11(Polarization)\uc758 \ubcc0\ud654<\/h3>\n\n\n\n<p>\uc5d8\ub9bd\uc18c\uba54\ud2b8\ub9ac\ub294 \ub450\uaed8\ub97c \uc9c1\uc811 \uc7ac\ub294 \uac83\uc774 \uc544\ub2d9\ub2c8\ub2e4. &#8220;\ube5b\uc774 \ubc15\ub9c9 \ud45c\uba74\uc5d0\uc11c \ubc18\uc0ac\ub420 \ub54c \ubcc0\ud558\ub294 \ud3b8\uad11 \uc0c1\ud0dc&#8221;\ub97c \uce21\uc815\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<ol start=\"1\" class=\"wp-block-list\">\n<li><strong>\uc785\uc0ac (Incident):<\/strong> \ud2b9\uc815\ud55c \ud3b8\uad11 \uc0c1\ud0dc\ub97c \uac00\uc9c4 \ube5b\uc744 \uc0d8\ud50c\uc5d0 \uc3e9\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\ubc18\uc0ac (Reflection):<\/strong> \ube5b\uc774 \ubc15\ub9c9\uc744 \ud1b5\uacfc\ud558\uace0 \uae30\ud310\uc5d0\uc11c \ubc18\uc0ac\ub418\uc5b4 \ub098\uc62c \ub54c, \ub9c9\uc758 \ub450\uaed8\uc640 \ubb3c\uc131\uc5d0 \ub530\ub77c \ube5b\uc758 \uc704\uc0c1\uacfc \uc9c4\ud3ed\uc774 \ubc14\ub01d\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\uac80\ucd9c (Detection):<\/strong> \ubc18\uc0ac\ub41c \ube5b\uc774 \ud0c0\uc6d0\ud615(Ellipse)\uc73c\ub85c \ubcc0\ud558\ub294 \uc815\ub3c4\ub97c \ubd84\uc11d\ud569\ub2c8\ub2e4.<\/li>\n<\/ol>\n\n\n<style>.kb-image1179_c9f4b8-55.kb-image-is-ratio-size, .kb-image1179_c9f4b8-55 .kb-image-is-ratio-size{max-width:780px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image1179_c9f4b8-55.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image1179_c9f4b8-55 .kb-image-is-ratio-size{align-self:unset;}.kb-image1179_c9f4b8-55 figure{max-width:780px;}.kb-image1179_c9f4b8-55 .image-is-svg, .kb-image1179_c9f4b8-55 .image-is-svg img{width:100%;}.kb-image1179_c9f4b8-55 .kb-image-has-overlay:after{opacity:0.3;}@media all and (max-width: 767px){.kb-image1179_c9f4b8-55.kb-image-is-ratio-size, .kb-image1179_c9f4b8-55 .kb-image-is-ratio-size{max-width:280px;width:100%;}.kb-image1179_c9f4b8-55 figure{max-width:280px;}}<\/style>\n<div class=\"wp-block-kadence-image kb-image1179_c9f4b8-55\"><figure class=\"aligncenter size-full\"><a href=\"https:\/\/www.jawoollam.com\/resources\/ellipsometry-tutorial\/what-is-ellipsometry\" class=\"kb-advanced-image-link\" target=\"_blank\" rel=\"noopener\"><img data-dominant-color=\"172031\" data-has-transparency=\"true\" style=\"--dominant-color: #172031;\" loading=\"lazy\" decoding=\"async\" width=\"850\" height=\"394\" src=\"https:\/\/rtlearner.com\/wp-content\/uploads\/2025\/12\/image-9.png\" alt=\"Principle of ellipsometry\" class=\"kb-img wp-image-1180 has-transparency\" srcset=\"https:\/\/rtlearner.com\/wp-content\/uploads\/2025\/12\/image-9.png 850w, https:\/\/rtlearner.com\/wp-content\/uploads\/2025\/12\/image-9-300x139.png 300w, https:\/\/rtlearner.com\/wp-content\/uploads\/2025\/12\/image-9-768x356.png 768w\" sizes=\"auto, (max-width: 850px) 100vw, 850px\" \/><\/a><figcaption>Principle of ellipsometry <\/figcaption><\/figure><\/div>\n\n\n\n<p>\uc774\ub54c \uce21\uc815\ub418\ub294 \ud575\uc2ec \ud30c\ub77c\ubbf8\ud130\ub294 \ub450 \uac00\uc9c0\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Psi (\u03a8):<\/strong> \ubc18\uc0ac\ub41c \ube5b(p\ud30c\uc640 s\ud30c)\uc758 <strong>\uc9c4\ud3ed(Amplitude)<\/strong> \ube44\uc728.<\/li>\n\n\n\n<li><strong>Delta (\u0394):<\/strong> \ubc18\uc0ac\ub41c \ube5b(p\ud30c\uc640 s\ud30c)\uc758 <strong>\uc704\uc0c1\ucc28(Phase Difference)<\/strong>.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">1.2. \uc2e4\ubb34\uc758 \ubcbd: \ubaa8\ub378\ub9c1(Modeling)\uacfc \ud53c\ud305(Fitting)<\/h3>\n\n\n\n<p>\uc5d8\ub9bd\uc18c\uba54\ud2b8\ub9ac\ub97c \ucc98\uc74c \uc4f0\ub294 \uc5f0\uad6c\uc6d0\uc774 \uac00\uc7a5 \ub2f9\ud669\ud558\ub294 \uc9c0\uc810\uc785\ub2c8\ub2e4. &#8220;Start&#8221; \ubc84\ud2bc\uc744 \ub20c\ub800\ub294\ub370 \ub450\uaed8\uac00 \uc548 \ub098\uc635\ub2c8\ub2e4. \ub300\uc2e0 \u03a8\uc640 \u0394 \uadf8\ub798\ud504\ub9cc \ub098\uc635\ub2c8\ub2e4. \uc5d8\ub9bd\uc18c\uba54\ud2b8\ub9ac\ub294 <strong>\uac04\uc811 \uce21\uc815<\/strong> \ubc29\uc2dd\uc774\uae30 \ub54c\ubb38\uc5d0, \uce21\uc815 \ub370\uc774\ud130\ub97c \uc218\ud559\uc801 \ubaa8\ub378\uacfc \ube44\uad50\ud558\uc5ec \uc5ed\uc73c\ub85c \ub450\uaed8\ub97c \ucd94\uc0b0\ud574\uc57c \ud569\ub2c8\ub2e4. \uc774\ub97c \ud53c\ud305(Fitting)\uc774\ub77c\uace0 \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>MSE (Mean Squared Error):<\/strong> \ub0b4 \ubaa8\ub378\uacfc \uc2e4\uc81c \uce21\uc815\uac12\uc774 \uc5bc\ub9c8\ub098 \uc77c\uce58\ud558\ub294\uc9c0\ub97c \ubcf4\uc5ec\uc8fc\ub294 \uc5d0\ub7ec \uac12\uc785\ub2c8\ub2e4. \ubcf4\ud1b5 <strong>MSE &lt; 5~10<\/strong> \uc815\ub3c4\uba74 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub2e4\uace0 \ubd05\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\ubaa8\ub378 \uc120\ud0dd \uac00\uc774\ub4dc:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\ud22c\uba85\ud55c \ubc15\ub9c9 (SiO<sub>2<\/sub>, SiN):<\/strong> <strong>Cauchy Model<\/strong>\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. (\uac00\uc7a5 \uae30\ubcf8)<\/li>\n\n\n\n<li><strong>\ube5b\uc744 \ud761\uc218\ud558\ub294 \ubc15\ub9c9 (Poly-Si, Metal):<\/strong> <strong>Tauc-Lorentz Model<\/strong>\uc774\ub098 <strong>Drude Model<\/strong>\uc744 \uc0ac\uc6a9\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n\n\n<blockquote class=\"wp-block-quote is-layout-flow wp-block-quote-is-layout-flow\">\n<p><strong>\ud83d\udca1 Pro Tip:<\/strong> \ud53c\ud305\uc744 \ud574\uc11c MSE\uac00 1.5\uac00 \ub098\uc654\ub2e4\uace0 \ubb34\uc870\uac74 \ubbff\uc73c\uba74 \uc548\ub429\ub2c8\ub2e4. \uad74\uc808\ub960(n) \uac12\uc774 \ubb3c\ub9ac\uc801\uc73c\ub85c \ub9d0\uc774 \uc548 \ub418\ub294 \uc218\uce58(\uc608: SiO<sub>2<\/sub>\uc778\ub370 n=3.0)\ub77c\uba74, \uadf8\uac83\uc740 \uc218\ud559\uc801 \uc6b0\uc5f0\uc77c \ubfd0 \ud2c0\ub9b0 \uacb0\uacfc\uc785\ub2c8\ub2e4. \ubc18\ub4dc\uc2dc <strong>Reference n\uac12<\/strong>\uacfc \ube44\uad50\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<\/blockquote>\n\n\n\n<h2 class=\"wp-block-heading\">2. \ubb3c\ub9ac\uc801\uc73c\ub85c \uae01\uc5b4\uc11c \ub450\uaed8 \uce21\uc815: \uc54c\ud30c \uc2a4\ud15d (Alpha Step)<\/h2>\n\n\n\n<p>\uacf5\uc2dd \uba85\uce6d\uc740 <strong>Surface Profiler<\/strong>\uc774\uc9c0\ub9cc, KLA Tencor\uc0ac\uc758 \uc7a5\ube44 \ubaa8\ub378\uba85\uc778 Alpha Step(\uc54c\ud30c \uc2a4\ud15d)\uc73c\ub85c \ub354 \uc798 \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4. LP\ud310\uc758 \ubc14\ub298\ucc98\ub7fc \ud301\uc774 \ud45c\uba74\uc744 \uae01\uace0 \uc9c0\ub098\uac00\uba74\uc11c \ub192\ub0ae\uc774\ub97c \uc7bd\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.1. \uc791\ub3d9 \uc6d0\ub9ac: \uc2a4\ud0c0\uc77c\ub7ec\uc2a4(Stylus) \uc811\ucd09<\/h3>\n\n\n\n<ol start=\"1\" class=\"wp-block-list\">\n<li>\ubbf8\uc138\ud55c \ub2e4\uc774\uc544\ubaac\ub4dc \ud301(Stylus)\uc774 \uc0d8\ud50c \ud45c\uba74 \uc704\uc5d0 \ub0b4\ub824\uc549\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc9c0\uc815\ub41c \uac70\ub9ac\ub9cc\ud07c \uc218\ud3c9\uc73c\ub85c \uc774\ub3d9\ud558\uba70 \ud45c\uba74\uc744 \uae01\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ud301\uc758 \uc218\uc9c1 \uc6c0\uc9c1\uc784\uc744 \uc804\uae30 \uc2e0\ud638\ub85c \ubc14\uafd4 \ub2e8\uba74(Profile)\uc744 \uadf8\ub824\uc90d\ub2c8\ub2e4.<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\">2.2. \uc5b8\uc81c \uc0ac\uc6a9\ud558\ub294\uac00?<\/h3>\n\n\n\n<p>\uc5d8\ub9bd\uc18c\uba54\ud2b8\ub9ac\ub294 \ud3c9\ud3c9\ud55c \ubc15\ub9c9\uc758 \ub450\uaed8\ub9cc \uc7b4 \uc218 \uc788\uc9c0\ub9cc, \uc54c\ud30c \uc2a4\ud15d\uc740 \ub2e8\ucc28(Step Height)\ub97c \uc7ac\ub294 \ub370 \ud2b9\ud654\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Etch Depth:<\/strong> \uc2dd\uac01 \uacf5\uc815 \ud6c4, PR(\uac10\uad11\uc81c)\uc774 \uc788\ub294 \uacf3\uacfc \uae4e\uc778 \uacf3\uc758 \ub192\uc774 \ucc28\uc774\ub97c \uc7b4 \ub54c.<\/li>\n\n\n\n<li><strong>Lift-off \ud6c4 \uae08\uc18d \ub450\uaed8:<\/strong> \uae08\uc18d \uc804\uadf9\uc758 \ub450\uaed8\ub97c \ud655\uc778\ud558\uace0 \uc2f6\uc744 \ub54c.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.3. \uc7a5\ub2e8\uc810<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\uc7a5\uc810:<\/strong> \uc6d0\ub9ac\uac00 \uc9c1\uad00\uc801\uc774\uace0, \uad74\uc808\ub960 \uac19\uc740 \uad11\ud559 \uc0c1\uc218\ub97c \ubab0\ub77c\ub3c4 \ub429\ub2c8\ub2e4. \uae08\uc18d\ucc98\ub7fc \ubd88\ud22c\uba85\ud55c \ub9c9\ub3c4 \uc7b4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\ub2e8\uc810:<\/strong> \ud301\uc774 \ud45c\uba74\uc744 \uae01\uae30 \ub54c\ubb38\uc5d0 \uc0d8\ud50c\uc5d0 \uc2a4\ud06c\ub798\uce58(Damage)\ub97c \uc90d\ub2c8\ub2e4. (PR\ucc98\ub7fc \ubb34\ub978 \ub9c9\uc740 \ud30c\uc5ec\uc11c \uc624\ucc28\uac00 \uc0dd\uae40). \uc218 nm \uc774\ud558\uc758 \ucd08\ubc15\ub9c9\uc740 \uce21\uc815\uc774 \uc5b4\ub835\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3. \ube44\uad50 \uc694\uc57d: Ellipsometry vs Alpha Step<\/h2>\n\n\n\n<p>\uc5b4\ub5a4 \uc7a5\ube44\ub97c \uc368\uc57c \ud560\uc9c0 \uace0\ubbfc\ub420 \ub54c \ucc38\uace0\ud558\uc138\uc694.<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><td><strong>\ube44\uad50 \ud56d\ubaa9<\/strong><\/td><td><strong>Ellipsometry<\/strong><\/td><td><strong>Alpha Step (\uc54c\ud30c \uc2a4\ud15d)<\/strong><\/td><\/tr><\/thead><tbody><tr><td><strong>\uce21\uc815 \ubc29\uc2dd<\/strong><\/td><td><strong>\uad11\ud559\uc801 (\ube44\uc811\ucd09, \ube44\ud30c\uad34)<\/strong><\/td><td><strong>\ubb3c\ub9ac\uc801 (\uc811\ucd09, \ud30c\uad34\uc801)<\/strong><\/td><\/tr><tr><td><strong>\uce21\uc815 \ub300\uc0c1<\/strong><\/td><td>\ubc15\ub9c9 \ub450\uaed8, \uad74\uc808\ub960, \uc18c\uad11\uacc4\uc218<\/td><td><strong>\ub2e8\ucc28(Step Height)<\/strong><\/td><\/tr><tr><td><strong>\uc801\uc6a9 \ubb3c\uc9c8<\/strong><\/td><td>\ud22c\uba85\/\ubc18\ud22c\uba85 \ubc15\ub9c9<\/td><td>\ubaa8\ub4e0 \ubb3c\uc9c8 (\uae08\uc18d, PR \ud3ec\ud568)<\/td><\/tr><tr><td><strong>\uc815\ubc00\ub3c4<\/strong><\/td><td>\ub9e4\uc6b0 \ub192\uc74c<\/td><td>\ubcf4\ud1b5 (~ \uc218 nm)<\/td><\/tr><tr><td><strong>\ub09c\uc774\ub3c4<\/strong><\/td><td>\uc5b4\ub824\uc6c0 (\ubaa8\ub378\ub9c1 \ud544\uc694)<\/td><td>\uc26c\uc6c0 (\uc9c1\uad00\uc801)<\/td><\/tr><tr><td><strong>\ud55c\uacc4\uc810<\/strong><\/td><td>\uae08\uc18d \ub450\uaed8 \uce21\uc815 \ubd88\uac00<\/td><td>\uc0d8\ud50c \uc190\uc0c1, \ucd08\ubc15\ub9c9 \ubd88\uac00<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">4. \uacb0\ub860: &#8220;\ubbff\uc744 \uc218 \uc788\ub294 \ub370\uc774\ud130\uc778\uac00?&#8221;<\/h2>\n\n\n\n<p>\uacc4\uce21(Metrology)\uc740 \uacf5\uc815\uc758 \ub208\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ud22c\uba85\ud55c \uc720\uc804\uccb4(SiO<sub>2<\/sub>, HfO<sub>2<\/sub>)\ub97c \uc6d0\uc790 \ub2e8\uc704\ub85c \uc815\ubc00\ud558\uac8c \uacc4\uce21\ud558\uace0 \uc2f6\ub2e4\uba74 <strong>Ellipsometry<\/strong>\ub97c \ub9c8\uc2a4\ud130\ud574\uc57c \ud569\ub2c8\ub2e4. \ud2b9\ud788 MSE \uac12 \uc904\uc774\uae30\uc5d0 \uc9d1\ucc29\ud558\uae30\ubcf4\ub2e4 &#8216;\ubb3c\ub9ac\uc801\uc73c\ub85c \ud0c0\ub2f9\ud55c \uad74\uc808\ub960\uc778\uac00&#8217;\ub97c \uba3c\uc800 \uc758\uc2ec\ud558\ub294 \uc2b5\uad00\uc744 \uac00\uc838\uc57c\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\uae08\uc18d \uc804\uadf9(Au, Pt)<\/strong>\uc774\ub098 <strong>\uc2dd\uac01 \uae4a\uc774<\/strong>\ub97c \ud655\uc778\ud574\uc57c \ud55c\ub2e4\uba74 \uace0\ubbfc\ud558\uc9c0 \ub9d0\uace0 <strong>Alpha Step<\/strong>\uc744 \uc0ac\uc6a9\ud558\ub294 \uac83\uc774 \uc88b\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n<p>\ub450 \uc7a5\ube44\uc758 \ud2b9\uc131\uc744 \uc815\ud655\ud788 \uc774\ud574\ud558\uace0 \uc0c1\ud669\uc5d0 \ub9de\ucdb0 \uad50\ucc28 \uac80\uc99d(Cross-check)\ud560 \ub54c, \ube44\ub85c\uc18c \uc5ec\ub7ec\ubd84\uc758 \uacf5\uc815 \ub370\uc774\ud130\ub294 \uc2e0\ub8b0\ub97c \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n<style>.kadence-column1179_a9e6f6-d6 > .kt-inside-inner-col{box-shadow:0px 0px 14px 0px rgba(0, 0, 0, 0.2);}.kadence-column1179_a9e6f6-d6 > .kt-inside-inner-col,.kadence-column1179_a9e6f6-d6 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column1179_a9e6f6-d6 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column1179_a9e6f6-d6 > .kt-inside-inner-col{flex-direction:column;}.kadence-column1179_a9e6f6-d6 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column1179_a9e6f6-d6 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column1179_a9e6f6-d6{position:relative;}@media all and (max-width: 1024px){.kadence-column1179_a9e6f6-d6 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column1179_a9e6f6-d6 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column1179_a9e6f6-d6\"><div class=\"kt-inside-inner-col\">\n<p><strong>\uad00\ub828 \uae00<\/strong><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-oxidation\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc0b0\ud654 \uacf5\uc815 (Oxidation)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-photolithography\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ud3ec\ud1a0 \uacf5\uc815 (Photolithography)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-etching\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc2dd\uac01 \uacf5\uc815 (Etching)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-deposition\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc99d\ucc29 \uacf5\uc815 (Deposition)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-doping\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \ub3c4\ud551 \uacf5\uc815 (Doping)<\/a><\/p>\n\n\n\n<p>\u2705<a href=\"https:\/\/rtlearner.com\/semiconductor-process-cleaning\/\">[\ubc18\ub3c4\uccb4 \uacf5\uc815] \uc138\uc815 \uacf5\uc815 (Cleaning)<\/a><\/p>\n<\/div><\/div>\n\n\n\n<p>\ucc38\uace0: <a href=\"https:\/\/www.jawoollam.com\/resources\/ellipsometry-tutorial\" target=\"_blank\" rel=\"noopener\">J.A.Woollam<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>When manufacturing semiconductor chips, we say, \"We deposited 5nm of HfO2.\"<\/p>","protected":false},"author":1,"featured_media":1180,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[3],"tags":[28],"class_list":["post-1179","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-semiconductor-process-and-device","tag-semiconductor"],"_links":{"self":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/1179","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/comments?post=1179"}],"version-history":[{"count":3,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/1179\/revisions"}],"predecessor-version":[{"id":1184,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/posts\/1179\/revisions\/1184"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media\/1180"}],"wp:attachment":[{"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/media?parent=1179"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/categories?post=1179"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/rtlearner.com\/en\/wp-json\/wp\/v2\/tags?post=1179"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}<!-- 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