[Semiconductor Metrology] Measuring the Thickness of Invisible Films: Ellipsometry and Alpha Step
When manufacturing semiconductor chips, we say, "We deposited 5nm of HfO2."
When manufacturing semiconductor chips, we say, "We deposited 5nm of HfO2."
I was originally going to write about deposition, but decided to write about the cleaning process first…
Silicon, a semiconductor, has properties close to those of an insulator. Therefore, its electrical properties…
Deposition process, also known as thin film process, is a process of depositing a thin, uniform film (1㎛) on a wafer.
The etching process is a process that patterns a wafer using photolithography…
In this article, I will talk about what I experienced while working on the photo process during my master’s degree…